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External dimensions
Gas system
Processing pressure adjustment
Stage dimensions
Vacuum gauge
power supply
remarks
Part Number
CPE-1000BHandling Company
SAKIGAKE-SemiconductorCategories
Image | Price (excluding tax) | External dimensions | Gas system | Processing pressure adjustment | Stage dimensions | Vacuum gauge | power supply | remarks |
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Available upon quote | 1,600mm (W) x 1.600mm (d) x 1,100mm (H) (not included, close lid closing) | One system | Manual adjustment by manual exhaust valve and gas introduced | Diameter 1,000mm | Analog display Pirani vacuum | Single phase 200V, 30A (50Hz/60Hz) | * Vacuum pumps are sold separately. In addition, we accept specification changes separately. |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
120.0hrs