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  3. Plasma Etching Systems
  4. Vacuum Plasma Etcher CPE-B series
  5. CPE-1000B
Vacuum Plasma Etcher CPE-B series-SAKIGAKE-Semiconductor

CPE-1000B | Vacuum Plasma Etcher CPE-B series
SAKIGAKE-Semiconductor

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External dimensions

Gas system

Processing pressure adjustment

Stage dimensions

Vacuum gauge

power supply

remarks

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  • Part Number

    CPE-1000B

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Vacuum Plasma Etcher CPE-B series CPE-1000B's performance table

Image Price (excluding tax) External dimensions Gas system Processing pressure adjustment Stage dimensions Vacuum gauge power supply remarks
Vacuum Plasma Etcher CPE-B series-Part Number-CPE-1000B Available upon quote 1,600mm (W) x 1.600mm (d) x 1,100mm (H) (not included, close lid closing) One system Manual adjustment by manual exhaust valve and gas introduced Diameter 1,000mm Analog display Pirani vacuum Single phase 200V, 30A (50Hz/60Hz) * Vacuum pumps are sold separately. In addition, we accept specification changes separately.

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SAKIGAKE-Semiconductor

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Plasma Etching Systems

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