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  3. Plasma Etching Systems
  4. Vacuum Plasma Etcher CPE-B series
  5. CPE-100B
Vacuum Plasma Etcher CPE-B series-SAKIGAKE-Semiconductor

CPE-100B | Vacuum Plasma Etcher CPE-B series
SAKIGAKE-Semiconductor

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External dimensions

Gas system

Processing pressure adjustment

Stage dimensions

Vacuum gauge

power supply

remarks

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  • Part Number

    CPE-100B

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Vacuum Plasma Etcher CPE-B series CPE-100B's performance table

Image Price (excluding tax) External dimensions Gas system Processing pressure adjustment Stage dimensions Vacuum gauge power supply
Vacuum Plasma Etcher CPE-B series-Part Number-CPE-100B Available upon quote 392mm (W) x 500mm (d) x 1,050mm (h) (not included, upper lid closing time), 850mm (W) x 900mm (d) x 1,050mm (without protrusions. One system Manual adjustment by manual exhaust valve and gas introduced Diameter 100mm, diameter 400mm Analog display Pirani vacuum Single-phase 100V, 15A (50Hz/60Hz) model CPE-400B, single-phase 100V, 30A (50Hz/60Hz)

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Plasma Etching Systems

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