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ULVAC, Inc
Ulvac Technologies, Inc.
Sumitomo Heavy Industries, Ltd.
NISSIN ION EQUIPMENT CO. LTD.
Nissin Electric Co., Ltd.
Michigan Ion Beam Laboratory
Kingstone Semiconductor Joint Stock Company Ltd.
IBS
Entegris
CoorsTek, Inc.

10 Ion Implanter Manufacturers in 2026

This section provides an overview for ion implanters as well as their applications and principles. Also, please take a look at the list of 10 ion implanter manufacturers and their company rankings. Here are the top-ranked ion implanter companies as of March, 2026: 1.Finisar, 2.Applied Materials, Inc., 3.Entegris.

Table of Contents

Categories Related to Ion Implanters

List of 10 Ion Implanter Manufacturers

*Including some distributors, etc.

Sort by Features

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  • Company Size: largest first
  • Year Founded: oldest first
  • Year Founded: earliest first

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  • United States of America
  • France
  • Japan
    • CoorsTek, Inc.
      • United States of America Address: 14143 Denver West Pkwy.Golden, Colorado, United States of America

      Manufacturer Overview

      CoorsTek, Inc., founded in 1910, is a family-run manufacturer of technical ceramic material formulations with products such as acetabular liners, baffle chambers, carbon brushes for power, focal plane array components, and precision fixed gauges used in transportation, food & beverage, electronic, chemicals, and semiconductor industries. The company in Golden, CO, USA, has research & development, custom manufacturing, and design assistance capabilities. The company's CIO- Matt Mehlbrech, was awarded the 2023 Colorado ORDIE Award for CIO of the Year.

    • Entegris
      • United States of America Address: 129 Concord Road, Billerica, Massachusetts, United States of America

      Manufacturer Overview

      Entegris Inc., founded in 1966 and headquartered in Billerica, Massachusetts, is a supplier of advanced materials and process solutions for the life sciences, semiconductor, and other tech industries. Some of its products and solutions include specialty chemicals, gas delivery systems, and filters used by logic, memory, and semiconductor equipment manufacturers. Over 65% of its factories are ISO 14001 and ISO 45001 certified, while its stock is traded on NASDAQ under ENTG. The ISO 9001-certified company has 4,400 active patents and offers several services, including analytical, field support, and refurbishment services.

    • Michigan Ion Beam Laboratory
      • United States of America Address: 1221 Beal Ave. Ann Arbor, Michigan, United States of America

      Manufacturer Overview

      The Michigan Ion Beam Laboratory, established in 1986 and located in Ann Arbor, Michigan, USA, is a manufacturer of ion beams for varied uses. The laboratory based company specializes in advanced ion beam technologies and offers a broad range of services, including ion implantation, ion beam analysis, and ion beam lithography. It offers optimal-quality ion beam services to a broad range of industries, and the advanced ion beam technologies offer precise material modification, analysis, and research capabilities, helping industries such as semiconductor manufacturing, materials science, and nuclear physics achieve breakthroughs.

    • Ulvac Technologies, Inc.
      • United States of America Address: 401 Griffin Brook Drive, Methuen, Massachusetts, United States of America

      Manufacturer Overview

      ULVAC Technologies, Inc., established in 1992, based in Andover, Massachusetts, is a manufacturer of vacuum technology products. The company was established by ULVAC, the original company based in Japan, to market to an American customer base. Its product portfolio includes vacuum equipment, peripheral devices, and vacuum components. Additionally, its facility is equipped with a class-10 cleanroom for process development, customer demonstration and manufacturing of the ENVIRO solvent-free dry photoresist stripper and Compound Semiconductor Materials Etch Systems. Its products serve the electric, machinery, automobile, chemical, and medical product industries.

    • ULVAC, Inc
      • Japan Address: 2500 Hagisono, Chigasaki, Kanagawa, Japan

      Manufacturer Overview

      Ulvac Inc., established in 1952 and headquartered in Kanagawa, Japan, is a manufacturer of vacuum equipment, components, peripheral devices, and materials for the solar cell and semiconductor industries, among others. The company operates businesses in six areas, including materials, components, electronic devices, semiconductors, and flat panel display production equipment. Some of its products include roll coaters, semiconductor production equipment, LED production equipment, leak detectors, and vacuum brazing furnaces. It is ISO9001 certified, and its net sales in the 2022 fiscal year were 227.5 billion Japanese Yen, with 34% of this amount coming from semiconductor and electronic device production equipment.

    • Nissin Electric Co., Ltd.
      • Japan Address: 47, Umezu-Takase-cho, Ukyo-ku, Kyoto, Kyoto, Japan

      Manufacturer Overview

      Nissin Electric Co., Ltd., established in Kyoto, Japan, in 1917, is a Supplier of electrical energy by substation equipment, and grid connection technology. The company provides factories and office buildings to realize the optimal operation of energy and technical support. They also provide industrial infrastructure, with an emphasis on power system and energy equipment. Their product range includes gas insulated switchgear, storage battery system, vehicle recognition system, high voltage test product and multiple environmental sensors.

    • IBS
      • France Address: Rue G. Imbert prolongée, Z.I. Peynier Rousset, français standard, France

      Manufacturer Overview

      IBS (Ion Beam Services), established in 1987 and headquartered in Peynier, France, is a manufacturer of ion implantation products and equipment. The company specializes in producing ion implantation systems, source cabinets, ion beam sources, and spare parts for semiconductor manufacturing. It maintains optimal-quality standards, and its products are ISO 9001:2015 certified for precision and rigidity. Its advanced ion implantation solutions, such as Flexion and Pulsion, offer semiconductor manufacturers increased control over the implantation process, resulting in improved device performance and reduced defects. It serves a wide range of industries, including semiconductor fabrication, research, and development.

    • Sumitomo Heavy Industries, Ltd.
      • Japan Address: ThinkPark Tower, 1-1 Osaki 2-chome, Shinagawa-ku, Tokyo, Japan

      Manufacturer Overview

      Sumitomo Heavy Industries, Ltd. (SHI) was established in 1888. SHI offers complete solutions for industrial machinery production and operations, heavy machinery for infrastructure, logistics, and construction, power generation systems as well as systems to reduce pollution, water purification, and ship construction. In addition, SHI also offers various software services including IT solutions.

    • NISSIN ION EQUIPMENT CO. LTD.
      • Japan Address: 4F Grand Kyoto, 75 Nishikujo Higashihieijo-cho, Minami-ku, Kyoto, Japan

      Manufacturer Overview

      NISSIN ION EQUIPMENT CO. LTD., established in Japan, in 1973 is a manufacturer engaged in ion beam and plasma technology. In 2001 the company established in Taiwan and opened a representative office in Shanghai, China. In 2010 Nissin Ion Equipment USA, Inc. is established as a wholly owned subsidiary in Texas, USA. The company produces cutting-edge silicon devices utilizing 300mm wafers and implantation for Sic and GaN devices and hydrogen ion implantation for VCSELs.

    • Kingstone Semiconductor Joint Stock Company Ltd.
      • Kingstone Semiconductor Joint Stock Company Ltd.
        Ion Implant

      Manufacturer Overview

      Kingstone Semiconductor Joint Stock Company, established in 2009 and headquartered in Shanghai, China, is a manufacturer of ion beam implantation equipment. The company specializes in manufacturing ion beam technology products, primarily catering to the PV, OLED, and semiconductor industries. Its product range includes advanced ion beam technology equipment designed to enhance the performance and efficiency of manufacturing processes. It holds ISO 9001:2015, CE, and RoHS certifications and offers benefits such as increased productivity, improved product quality, and reduced downtime. It finds application in semiconductor fabrication, PV cell manufacturing, OLED production, and other advanced technologies, resulting in advancements in these industries.

Ion Implanter Manufacturer Ranking

*Including some distributors, etc.

Derivation Method

The ranking is calculated based on the click share within the ion implanter page as of March 2026. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.

Number of Employees

  1. Sumitomo Heavy Industries, Ltd.: 24,584
  2. ULVAC, Inc: 6,235
  3. Nissin Electric Co., Ltd.: 5,382

Newly Established Company

  1. NISSIN ION EQUIPMENT CO. LTD.: 1999 (27 years ago)
  2. Michigan Ion Beam Laboratory: 1986 (40 years ago)
  3. ULVAC, Inc: 1952 (74 years ago)

Company with a History

  1. ULVAC, Inc: 1952 (74 years ago)
  2. Michigan Ion Beam Laboratory: 1986 (40 years ago)
  3. NISSIN ION EQUIPMENT CO. LTD.: 1999 (27 years ago)

Ion Implanter Manufacturers in United States

*Including some distributors, etc.

Global Distribution of Ion Implanter Manufacturers by Country

*Including some distributors, etc.

Country Number of Companies Share (%)
United States of America United States of America 4 44.4%
Japan Japan 4 44.4%
France France 1 11.1%

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List of Ion Implanter Products

38 products found

38 products

Oxford Instruments Ltd.

Excellent homogeneity & maximum flexibility Ionfab 300 IBE

740+ people viewing

Last viewed: 5 hours ago

■Summary It has maximum flexibility with excellent homogeneity and is suitable for a wide range of application areas. Our systems have flexible har...

Unisoku Co., Ltd.

SPM unit product 2kV sputter ion gun IB-201

380+ people viewing

Last viewed: 8 hours ago

This is an "argon sputter ion gun" designed to clean sample surfaces in ultra-high vacuum.

Vacuum related equipment Electron gun/ion gun Low energy electron gun

110+ people viewing

Last viewed: 1 day ago

■“Electron gun/ion gun system” manufactured by Kimball Physics Kimball Physics' electron guns and ion guns, which are used all over the world, are ...

Oxford Instruments Ltd.

Ion beam technology enables maximum system utilization with a single tool Ionfab 300 IBD

550+ people viewing

Last viewed: 5 hours ago

■Summary It is chosen because it provides thin film deposition with high quality, high density and smooth surfaces. Ion beam technology can provid...

Fuji Inback Co., Ltd.

Turbomolecular pump (hybrid bearing) HiPace® IT series (model for ion implanter)

380+ people viewing

Last viewed: 6 hours ago

■Application ・Ion implantation ■Features ・Specialized for light gas exhaust ・High durability achieved by nickel coated rotor ・Temperature cont...

ULVAC Sales Co., Ltd.

Medium current ion implanter for research and development IMX-3500

420+ people viewing

Last viewed: 5 hours ago

■Summary The medium current ion implanter IMX-3500 is an ion implanter with a maximum energy of 200kV and a wafer size of up to 8 inches, making it...

ULVAC Sales Co., Ltd.

High temperature ion implanter for SiC IH-860DSIC

530+ people viewing

Last viewed: 5 hours ago

■Summary This is a high-energy ion implanter for SiC mass production equipped with a high-temperature ESC. ■Applications Ion implanter for SiC ■F...

FUTEX co., ltd.

For FIB ion gun + 30kV high -voltage power supply IB303XP

670+ people viewing

Last viewed: 8 hours ago

■ configuration ・ Acceleration power supply ・ Filament power supply ・ Sapressa power supply ・ Extractor power supply ■ Optional ・ Condenser / lens...

ULVAC Sales Co., Ltd.

Medium current ion implanter SOPHI-200/260

430+ people viewing

■Summary The medium current ion implanter SOPHI-200/260 is an 8, 6, and 5 inch ion implanter equipped with the latest technology. We are accepting ...

ULVAC Sales Co., Ltd.

Ion implanter SOPHI-400

470+ people viewing

■Summary This is a high energy ion implanter that can handle up to 2,400KeV. ■Applications Thin substrate process for power devices, IGBT process ...

ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) FIG-5 Package

480+ people viewing

Last viewed: 5 hours ago

■Summary This ion gun is a revolutionary ion gun that has a maximum beam current of 10 μA, a beam diameter of less than 150 μm, and a maximum curre...

ULVAC Sales Co., Ltd.

Ion implanter SOPHI-30

510+ people viewing

Last viewed: 2 hours ago

■Summary This is an ion implanter that supports low acceleration and high concentration. ■Applications Thin substrate process for power devices, I...

FUTEX co., ltd.

For FIB ion gun + 30kV high -voltage power supply / standard type IB303XS

750+ people viewing

■ configuration ・ Acceleration power supply ・ Filament power supply ・ Sapressa power supply ・ Extractor power supply ■ Optional ・ Condenser / lens...

Kitano Seiki Co., Ltd.

Source Scanning ion gun IS40E1

520+ people viewing

Last viewed: 15 hours ago

■Summary The 40E1 ion gun is a convergent ion gun that uses a two-stage exit lens. The spot size and accelerating voltage (0.15eV to 5keV) can be e...

ULVAC Sales Co., Ltd.

Sputter ion pump controller GST-07L Ver.B

250+ people viewing

■Summary GST-07L-B is a sputter ion pump control that has achieved high functionality and reliability thanks to ULVAC's extensive technical capabil...

ULVAC Sales Co., Ltd.

Analysis/Measurement Equipment Surface Analyzer Ion Gun/Electron Spectrometer (CMA) USG-3 Package

320+ people viewing

Last viewed: 15 minutes ago

■Summary ・Low price ・Can accelerate up to 2kV ・With port aligner ・Adjust the length from the mounting flange to the tip of the ion gun as desir...

Kitano Seiki Co., Ltd.

Source Simple ion gun IS40C1

600+ people viewing

Last viewed: 15 hours ago

■Summary The 40C1 ion gun is a compact and simple ion gun for cleaning sample surfaces. The mounting flange is DN40CF (outer diameter 70mm) and can...

Yamanaka Advanced Material Co., Ltd.

Semiconductor materials Ion implantation materials

370+ people viewing

Last viewed: 1 day ago

We provide ion implantation materials used for "impurity addition" in semiconductor processes. The ion implantation materials we handle include gas...

Plasmion Assist

"Various functional DLC" Intelligent DLC by Plasmion Inject

360+ people viewing

Last viewed: 10 hours ago

・ DLC coding is possible for most materials, including non -ferrous metals such as aluminum and rubber, etc. ・ We propose various functional DLC ac...

8 models listed







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