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This section provides an overview for mass flow controllers as well as their applications and principles. Also, please take a look at the list of 37 mass flow controller manufacturers and their company rankings. Here are the top-ranked mass flow controller companies as of December, 2024: 1.Brooks Instrument, 2.Plasma Etch, Inc., 3.RJM Sales, Inc..
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Postdoctoral researcher, conducting research on the production of cathode composite particles for solid-state batteries in the Equipment Engineering Group of Osaka Prefecture University.
Belongs to the Resource and Energy Recycling Laboratory, Nagaoka University of Technology, and conducts research on the development of DDR-type zeolite membranes for CO2 separation and the capture of CO2 from digestion gas generated from sewage treatment plants.
https://researchmap.jp/eiji-hayakawa
Thesis
https://doi.org/10.3390/membranes11080623
http://www.ijcea.org/index.php?m=content&c=index&a=show&catid=109&id=1177
https://www.sciencedirect.com/science/article/abs/pii/S1387181119305529?via%3Dihub
https://www.sciencedirect.com/science/article/abs/pii/S138358661833154X?via%3Dihub
A mass flow controller is a device that measures and controls the flow rate of a fluid. It is utilized in process fields where advanced flow control is required. There are two types of flow rates: volumetric flow rate and mass flow rate. Mass flow sensors measure mass flow, not volume flow. Mass flow is not affected by ambient conditions such as fluid type, characteristics, temperature, etc. Therefore, it can measure and control flow more accurately than volumetric pressure.
Mass flow controllers can control fluids in addition to measuring flow rates. Due to their high accuracy and stable control, they are used in various process sites and laboratories. In the semiconductor manufacturing process, they are utilized in film deposition and etching. In addition to semiconductors, a wide variety of products are used, including optical fiber, liquid crystals, and biotechnology. Laboratories also use mass flow controllers in analytical instruments to control carrier gases.
Mass flow controllers consist of a sensor, a bypass, a fluid control valve, and an electrical circuit. Thermal flow sensors are often used as flow sensors. Fluid passes through the mass flow controller to the sensor and bypasses. In the sensor, a heater is wrapped around the tubing through which the fluid passes. The temperature difference between the gas flowing upstream and downstream of the tubing is converted into an electrical signal for flow measurement. In thermal mass sensors, there is a limit to the amount of fluid that can be sent to the sensor. Therefore, by diverting a portion of the fluid to the sensor and the rest to the bypass, the flow distribution ratio can be kept constant, enabling highly accurate flow control even with significant flow rates. The fluid control valve adjusts the flow rate based on the sensor's measured flow rate. Fluid control valves use solenoid actuators, thermal actuators, and piezoelectric actuators as actuators (devices that convert electrical signals into physical motion).
To select a mass flow controller, you need information on the gas type, maximum flow rate, and working pressure requirements. Mass flow controllers are calibrated for specific gas species, so they cannot accurately measure different gas species.
In the case of corrosive gases, you should choose sealing materials and other materials with high corrosion resistance. Since the flow control range of mass flow controllers is generally 2-100% of the maximum flow rate (F.S.), you should select the maximum flow rate that matches your application. The flow control valve used in mass flow controllers adjusts the flow rate by valve opening, so a pressure difference between the primary and secondary sides is required. Generally, a pressure difference of 50-300 kPa is considered appropriate, but if the pressure difference is too large or too small, the flow rate cannot be adjusted correctly. Additionally, consider the temperature to be controlled and the fittings in your selection process.
*Including some distributors, etc.
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Sierra Instruments, founded in 1971, is a manufacturer of flow measurement solutions for the gas, liquid, and steam sectors. The product line has incline or insertion mass flow controllers/meters, level switches, flow conditioners, calibration systems, and mass flow sensors. The company provides digital communication protocols to automate flow meters and software upgrades & improvements. The company in Monterey, CA, offers a 12-month limited warranty, is ISO 9001 registered, and is a member of the TASI group.
Eastern Instruments is an American manufacturer of flow measurement equipment and systems that was established in 1984. From their 26,000 sq ft facility in Wilmington, North Carolina, the company produces mass flow meters, feeders, airflow devices, and control systems for air, gas, or solid particles. These are used in various industrial processes within the petrochemical, energy, food, and agricultural sectors. Eastern Instruments also offers clients contract manufacturing and on-site support services such as product installation, maintenance, and repair.
Alicat Scientific, established in 1991, and based in Arizona, USA, is a manufacturer and supplier of flow and pressure instrumentation. The product portfolio includes a diverse range of mass flow meters and controllers, liquid flow meters and controllers, pressure transducers and controllers, accessories, and replacement parts. The products are used in various industries which include aerospace, defense, bioreactors, calibration, metrology, food, environmental, glass, and optical. The company products have ISO certifications. The company also offers technical instrumentation documentation with support and services.
Sierra Instruments, Inc. was established in 1973 and has its headquarters in California, United States. The company is a manufacturer of flow instruments for nearly every liquid, gas, and steam application, with locations in Europe and China. Sierra's range of flow instruments includes immersible thermal mass flow meters, vortex flow meters, and thermal mass flow controllers for various applications. The company's flow controllers have applications across global industries such as oil and gas, energy management, biotech, and aerospace.
Brooks Instrument, established in 1946 and currently a subsidiary of Illinois Tool Works Inc. (ITW), is an American manufacturer with its global headquarters in Hatfield, Pennsylvania, specializing in flow and pressure measurement and control technology. The company’s offerings encompass various mass flow controllers and meters, tailored for heat treating, cutting, and other thermal processes for mass flow sensors. Additionally, the company delivers pressure and vacuum controller technology for original equipment manufacturers (OEMs). It develops vaporization technology, utilized in industrial and semiconductor processes, for water vaporization or humidification, along with variable area (VA) flow meters (rotameters) for liquid or gas flow measurement.
Plasma Etch, Inc., established in 1982 and headquartered in Reno, Nevada, is a manufacturer and supplier of plasma cleaning and etching systems. Their range of products includes plasma cleaners, utilized for removing contaminants like organic residues, metal oxides, and particulates from surfaces in semiconductor, medical device, and printed circuit board manufacturing. Plasma etchers are employed for material etching, while plasma bonders are used to bond materials like metals, plastics, and ceramics. Additionally, they offer plasma adhesion promoters to enhance material adhesion and surface modification services to modify properties like wettability and corrosion resistance.
Hi-Tech Furnace Systems Inc., located in Shelby Township, Michigan has been a manufacturer and installer of retort style furnace systems since 1990. Its offerings encompass Fluoride Ion Cleaning (FIC) Systems, effectively removing contaminants from metal surfaces and proving advantageous for turbine engine components. Additionally, its Chemical Vapor Deposition (CVD) Systems deposit protective films onto metal substrates, elevating the quality of parts. Complementing these solutions are Vapor Phase Coating (VPC) Systems and Gas Delivery Systems, further enhancing its comprehensive array of specialized services.
RJM Sales was founded in 1970 and is now headquartered in Somerset, New Jersey. The company is an employee-owned manufacturer’s representative and distribution company of industrial instrumentation and controls, filtration, gas generation, and laboratory instrumentation products. The company serves a breadth of industries including food, pharmaceuticals, coil & gas, chemical, power generation, and other markets. The company’s two main product categories are Industrial Products and Laboratory Products. Industrial Products include signal conditioners, digital indicators, and moisture analysis equipment. Laboratory Products include YSI reagents, maintenance kits, and other supplies.
Kelly Pneumatics was established in 2004 and is based out of Newport Beach, California. The company is a designer and manufacturer of proportional valves, pressure regulators, and pneumatic control products for numerous industries including medical, alternative energy, test equipment, semiconductor equipment, and gas analyzers. The company’s standard products include proportional valves, pressure regulators, flow controllers, flow sensors and meters, and electronic boards. The company provides custom solutions for pneumatic valves, regulators, and control products to match customers’ needs. These include analyzing, engineering, prototyping, and testing.
MKS Instruments, founded in 1961 and based in Massachusetts, USA, is a manufacturer and distributor of instruments and process control solutions for advanced manufacturing processes. Its solutions are critical to addressing the challenges of miniaturization and complexity in advanced device manufacturing by enabling increased power, feature enhancement, and optimized connectivity. Its offerings include compact pressure transducers, mass flow meters, and microwave generators, used in advanced manufacturing and metrology applications. The company is certified to ISO 9001:2015, and has received an Innovators Award for its ESI CapStone system.
Aalborg Instruments & Controls, Inc., established in 1972 in Orangeburg, New York, USA, is a manufacturer and supplier of precision instrumentation for flow measurement and control. The company's product range includes Mass Flow Controllers, Variable Area Flow Meters, Paddle Wheel Flowmeters, Flow Control Valves, and Peristaltic Pumps, catering to industries requiring accurate flow measurements and controls such as research, industrial processes, and manufacturing. Its services include product manufacturing, flow calibration, and technical assistance. With a long period of experience, the company consistently exceeds expectations in precision and service.
Fluid Components International, founded in San Marcos, CA, in 1964 is a manufacturer of thermal mass flow meters, flow switches and level switches for industrial process measurement applications. The company's product portfolio includes Flow Switch, Flow Conditioners, Gas Flow Meter, Level Measurement Products, and Flow Straighteners. The company serves markets including Medical and Healthcare, Aerospace and Defense, Consumer Goods, Industrial Manufacturing and Construction and Building. The company also provides services including national distribution, product selection, customized services, technical support and customer service.
Fluigent, founded in 2005 and located in Le Kremlin-Bicêtre, France, is a developer and manufacturer of fluid control systems. The company offers a broad range of products that include microfluidic devices, modular OEM microfluidic flow controllers, microfluidic OEM pressure controllers, and OEM microfluidic pressure sources. These products find general use in the field of microfluidics, allowing for the precise manipulation and control of small fluid volumes. The company’s products cater to industries, including life sciences for genomics and cell analysis, drug discovery, biotechnology, chemical analysis, and diagnostics.
KOFLOC Corporation, established in 1949, is a manufacturer and retailer of standard and off-catalog custom gas generators, precision flow instruments, and engineering devices headquartered in Osaka, Japan. The company manufactures various flow instruments for measuring and controlling fluids, including flow meters, pressure regulating valves, flow control valves, and mass flow controllers and meters. The company’s gas generators are used to generate various gases from the air and water, including nitrogen gas, hydrogen gas, oxygen gas, ozone gas, and clean dry air. KOFLOC is ISO14001: 2006-certified company whose equipment are used in aerospace, water treatment plants, power generation, and refineries.
Burkert UK Limited, established in 1946 in Cirencester, UK, is a manufacturer of measurement and control systems for liquids and gas. The company, a subsidiary of Burkert Fluid Control Systems, specializes in fluid control systems for various industries. Their product portfolio includes a wide range of products such as solenoid valves, process valves, sensors, controllers, and pneumatic actuators. These solutions cater to various applications in industries like water treatment, food and beverage, pharmaceuticals, and industrial automation. Their fluid control solutions offer numerous benefits, including precise and optimum control of fluids, enhanced process efficiency, reduced energy consumption, and compliance with industry regulations.
Vögtlin Instruments GmbH, established in 1986 and based in Muttenz, Switzerland, is a manufacturer of precision gas flow instruments. The company produces products such as mass flow meters of different models and precision control valves used in different applications such as gas analysis, laboratory equipment, life sciences, research & development, test equipment, and OEM applications. All the gas mass flow meters and mass flow controllers manufactured by the company will give analog and digital output while offering IP67/NEMA6 and ATEX protection. The company has technology centers in different countries, such as the USA, Switzerland, Germany, and Great Britain.
The Azbil Corporation (formerly the Yamatak Corporation) aims to realize safety, comfort, and fulfillment in people's lives and contribute to global environmental preservation through "human-centered" automation. They provide their customers with timely solutions via an integrated structure that extends from planning and development to maintenance and service, capable of responding rapidly to customer needs.
OVAL Corporation, founded in Tokyo, Japan, in 1949 is a manufacturer of metrological control equipment and related systems and measuring devices and environmental control related instruments. The company's product portfolio includes batch controllers, flow computers, peripherals and related instruments, system solutions and calibration equipment. Their products are used in industries such as Food and Beverage, Pharmaceutical and Biotechnology, Chemical and Petrochemical, Environmental Testing and healthcare. The company provides services such as Product Selection Guidance, Engineering Support, and Custom Manufacturing.
TOFLO CORPORATION was established in 1973 and is a manufacturer of flow sensing and flow control products based in Hino, Tokyo, Japan The company manufactures various flow-related products such as variable area flow meter, flow control valve, vortex flow meter, plastic pressure switch, and metal check valve. The products are used in various applications such as gas management, chemical industries, waste water management, and industrial manufactures. The company had acquired certifications such as ISO 9001 for the Quality Management System and Eco Action 21 for environmental sustainability.
Fujikin was founded in 1930 and headquartered in Itachibori Nishi-ku, Osaka, Japan is a manufacturer of specialized valve equipment. The company offers a wide variety of valves including Ultra-precision valves for semiconductor manufacturing, Cryogenic ultra-precision valves for space exploration, Aseptic process valves for pharmaceutical and food manufacturing, valves for new energy and rechargeable batteries, and valves for nuclear power plant instrumentation. Additionally, the company has diversified its portfolio to include the development of cutting-edge medical equipment. This expansion includes the creation of ultrasonic diagnostic equipment, universal X-ray photography devices, telemedicine systems, and healthcare monitoring devices.
HORIBA RADIO LABORATORY was established in Japan in 1945 and has spent the last three-quarters of a century growing as an R&D company and engaged in international operations. HORIBA Scientific offers 200 years of experience developing high-performance scientific instruments and analytical solutions. The HORIBA Group of worldwide companies provides an extensive array of instruments and systems for applications ranging from automotive R&D, process and environmental monitoring, in-vitro medical diagnostics, semiconductor manufacturing, and metrology to a broad range of scientific R&D and QC measurements. Operating in Asia, Europe, and North and South America, HORIBA scientific develops solutions that go beyond just products.
Q&T Instrument, established in 2005, and based in Henan, China, is a manufacturer and supplier of flow meters. The product portfolio has a diverse range of flow meters which includes electromagnetic, vortex, ultrasonic, turbine, mass, rotameter, level meter, mask, thermometer, radar, and oval gear flow meter. The products are used in various applications which include liquid flow, gas flow, intelligent water meters, level meters, and flow test devices. The company also offers production development with innovation activity.
FC Technik AG, founded in 2004 and headquartered in Winterthur, Switzerland, is a manufacturer of gas control systems and components, primarily for the steel production industry. The company's primary product lines comprise gas control units, pressure controllers, and temperature- and pressure-compensated MFCs (mass flow controllers) for noncorrosive gases. Its products include booster gas regulation units, SAAC (shroud anti-aspiration control) systems widely used by steel manufacturers, and stainless steel pressure controllers for use in food processing. The company has installed numerous systems worldwide, with notable clients including AK Steel Dearborn, SeAH Besteel, and Saarstahl AG.
Proportion-Air, Inc., established in 1985, is a US manufacturer of electronic air pressure regulators and air flow control valves located in McCordsville, Indiana. The company produces various regulators, including flow controllers, pressure transducers, volume boosters, and safety regulators, that accept analog and digital signals. Additionally, they supply auxiliary accessories for their products. The company services several markets, such as industrial manufacturing, transportation, aerospace, pharmaceutical, and food processing. Product uses include water jet cutters, aircraft fuselage testing, and medical testing.
Xi’an Huaheng Instrument Co., Ltd. is a manufacturer and supplier of various industrial automation instruments based in China. Founded in 2000, the company specializes in a wide range of instruments and devices, including pressure transmitters, level transmitters, flow meters, and HART communicators. One sample product is its pressure transmitters, which are crucial for measuring and monitoring pressure in industrial processes. The company provides professional services to a wide range of industries, including power, petroleum, chemical metallurgical, cement, and more. The company delivers cost-effective industrial automation instrument products to meet the demands of its customers.
Teledyne Hastings Instruments is a manufacturer of vacuum as well as gas mass flow instruments that was originally established as Hastings-Raydist, Inc. in 1944 before becoming a subsidiary of Teledyne Technologies, Inc. in 1979. The company offers gas mass flow meters for measuring and controlling gas flow rates between 5-15,000slm, vacuum sensors for measuring atmosphere to ultra-high vacuum pressure, and single channel power supplies for operating flow meters or controllers. The company also provides custom manufacturing, calibration, and repair services for its clients.
Ohkura Electric Co., Ltd., started in 1933 and situated in Sakado, Japan, is a manufacturer and supplier of industrial instruments and semiconductor equipment. The company specifically fabricates system equipment, recorders, temperature controllers, signal converters, and mass flow controllers. It also manufactures furnaces, vertical heat treatment furnaces, pressure transmitters, and thyristor units. The subcategories of its system equipment, machine controllers, are controllers that integrate functions ranging from loop control to sequence control. Its industrial instruments are used in the automation of nuclear power plant systems as well as other industrial fields.
BRONKHORST HIGH-TECH B.V. is a ISO 9001-certified manufacturer of low flow fluid handling products founded in 1981 and headquartered in Ruurlo, the Netherlands. The company produces gas and liquid flow meters and controllers. These include Coriolis mass flow meters, pressure transducers or controllers, and thermal mass flow meters . The company offers calibration, product customization, and technical support for clients needing additional support. Its customers are primarily in the bioprocessing, research, and semiconductor sectors.
IKS PVD Technology, a company established in 2008, based in Xiangtan, Hunan, China, is a manufacturer and supplier of vacuum coating machines and related accessories. The company Offers product solutions for various industrial and decorative applications such as cutting tools, molds, automotive parts, hardware, jewelry, and glasses. It has a range of products such as magnetron sputtering coating machines, arc evaporation coating machines, multi-arc ion coating machines, and optical coating machines. These products are designed to operate with quality, and durability. It is a chief supplier of vacuum coating machines and related accessories in China and abroad.
Sensirion is based in Stäfa, Switzerland, and is a manufacturer of various sensor products that was established in 1998 as a spin-off from the Swiss Federal Institute of Technology (ETH Zurich). The company’s product lineup includes gas flow sensors for medical devices such as ventilators, particulate sensors for indoor air quality control applications, and humidity sensors for use in HVAC systems or smart homes. It also offers specialized sensor models, such as for CO2, formaldehyde, and mass flow controllers. The company mainly serves clients in the consumer appliances, medical devices, and public utilities sectors.
Shanghai Yangji Electronic Technology Co. Ltd is a manufacturer and supplier of various industrial meters that was established in 2012 in Shanghai, China. The company’s product lineup includes heat meters such as mechanical and heat cost allocation models, gas meters such as turbine and diaphragm models, and water meters such as ultrasonic and prepaid models. It also offers electricity meters such as three- and single-phase models. The company’s products are primarily used by clients in the property and facility management sector, as well as in the smart city industry.
Facet Filtration Group is a manufacturer and supplier of filtration products established in 1943 and headquartered in Tulsa, Oklahoma, USA. The company primarily produces filtration solutions tailored to different industry applications, including aviation and heavy equipment. It also offers fuel monitors for ensuring and maintaining the purity of fuel, portable fueling systems for mobile siphoning or refueling operations, and coalescer separators for separating liquids from gasses. The company mainly serves clients in North America’s aerospace, military, and industrial processing sectors.
B&B Instruments (BBI) was incorporated in Indiana in 1972 and still operates out of Indianapolis, Indiana today. BBI is an authorized stocking distributor for manufacturers of measurement, control & calibration equipment for pressure, temperature, flow, humidity, & level instrumentation serving both startups as well as Fortune 500 clients in industries such as utilities, metals, food, process, industrial, OEMs, and technical. BBI’s product categories include calibrators, controllers, meters, flow, gauges, humidity, level, meters, pressure, switches, temperature, and transmitters. Featured products include Autrol Transmitters APPT-3100 Differential Pressure Transmitter, Barksdale’s UDS7 Series Solid State Pressure Switches, Kytronic’s actuator positioner, and Monarch DataChart’s DC1250 2-Channel Paperless Recorder.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Brooks Instrument |
7.3%
|
| 2 | Plasma Etch, Inc. |
6.9%
|
| 3 | RJM Sales, Inc. |
6.2%
|
| 4 | Sierra Instruments |
4.9%
|
| 5 | Alicat Scientific |
4.7%
|
| 6 | B & B Instruments, Inc. |
4.4%
|
| 7 | Kelly Pneumatics, Inc. |
4.4%
|
| 8 | Hitachi Metals, Ltd. |
3.8%
|
| 9 | Hi-Tech Furnace System, Inc. |
3.6%
|
| 10 | Sierra Instruments, Inc. |
3.3%
|
Derivation Method
The ranking is calculated based on the click share within the mass flow controller page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
United States of America
|
12 | 44.4% |
|
Japan
|
9 | 33.3% |
|
China
|
2 | 7.4% |
|
France
|
1 | 3.7% |
|
United Kingdom
|
1 | 3.7% |
|
Switzerland
|
1 | 3.7% |
|
Netherlands
|
1 | 3.7% |
110 products found - Page 2
110 products - Page 2
Sensirion
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The SFC6000 mass flow controller is Sensirion's next generation mass flow controller, and with an unparalleled price/performance ratio and delivery...
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The mass flow controller "SFC5500" series is the culmination of Sensirion's 20 years of experience in precision control of gas flow. The sensor is ...
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The mass flow controller "SFC5500" series is the culmination of Sensirion's 20 years of experience in precision control of gas flow. The sensor is ...
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The mass flow controller "SFC5500" series is the culmination of Sensirion's 20 years of experience in precision control of gas flow. The sensor is ...
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Sensirion
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The SFC5400 mass flow controller measures and controls mass flow with excellent accuracy, long-term stability, and repeatability, and can measure o...
Sensirion
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The SFM6000 is the valveless sister of the SFC6000 mass flow controller, offering superior performance at an even lower price. The SFC6000 mass fl...
Sensirion
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The SFM6000 is the valveless sister of the SFC6000 mass flow controller, offering superior performance at an even lower price. The SFC6000 mass fl...
Sensirion
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The SFM6000 is the valveless sister of the SFC6000 mass flow controller, offering superior performance at an even lower price. The SFC6000 mass fl...
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The SFM6000 is the valveless sister of the SFC6000 mass flow controller, offering superior performance at an even lower price. The SFC6000 mass fl...
Sensirion
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Sensirion
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TAKANO CO.,LTD.
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■Product features ・Low cost By adding a flow rate sensor measurement and controller to the proportional solenoid valve, we have achieved high reli...
Regal Joint Co., Ltd.
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■Features - Gas type and flow rate can be easily changed without stopping equipment operation. - Full scale value can be changed without loss of ac...
Regal Joint Co., Ltd.
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■Features ・Cost of ownership (COO) is also reduced by increasing system uptime, reducing maintenance, and reducing regular recipe adjustments and ...
Regal Joint Co., Ltd.
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■Features ・Select and change gas type and full-scale flow range using MultiFlo technology ・User-friendly interface with diagnostic functions and ...
