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  4. Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR (TAZMO CO.,LTD.)
Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR-TIGRISR
Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR-TAZMO CO.,LTD.

Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR
TAZMO CO.,LTD.

About This Product

The batch cleaning equipment TIGRIS®200 and TIGRIS®300 are high-performance immersion cleaning and etching systems compatible with 200mm/300mm, with proprietary technology added to industry standard specifications. Process management using various monitors enables high-quality processes. Additionally, the phosphoric acid regeneration systems PSYRION® and NISON®1800, which are environmentally friendly and reduce the amount of chemicals used, can be installed as options.

■Product features

·platform Equipped with a transport system that enables high-speed processing. ・Process unit We achieve high quality processes through management methods that utilize various monitors. Equipped with the optional phosphoric acid regeneration system PSYRION® or NISON®1800, it contributes to environmental measures and reduction of chemical usage. Process modules can be laid out freely. ・Easy to operate It has an interface with excellent visibility.

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    Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR

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1 Models of Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR

Image Part Number Price (excluding tax) Applicable work
Semiconductor manufacturing equipment Cleaning equipment Batch type immersion cleaning/etching system TIGRISR-Part Number-TIGRISR

TIGRISR

Available upon quote

Φ200 & 300mm wafer

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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Etching Equipment
Etching Equipment　TAZMO CO.,LTD.
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