10 Semiconductor Cleaning Equipment Manufacturers in 2024
This section provides an overview for semiconductor cleaning equipment as well as their applications and principles. Also, please take a look at the list of 10 semiconductor cleaning equipment manufacturers and their company rankings. Here are the top-ranked semiconductor cleaning equipment companies as of April, 2024: 1.Modutek Corporation, 2.ACM Research, Inc., 3.Ransohoff.
Table of Contents
Categories Related to Semiconductor Cleaning Equipment
What Is Semiconductor Cleaning Equipment?
Semiconductor cleaning equipment includes the tools and systems employed in the cleaning stage of semiconductor manufacturing, a critical phase that accounts for a significant portion of the production process.
This equipment is designed to remove contaminants before critical processes like high-temperature treatments and thin-film depositions, as well as to clear away residues like resist after etching processes. It is categorized into wet and dry types, based on the cleaning medium used.
Uses of Semiconductor Cleaning Equipment
Utilized across various manufacturing stages, semiconductor cleaning equipment is especially crucial in the initial stages of device formation on silicon wafers and the final stages involving device separation and packaging. Its role is pivotal in ensuring contaminant-free surfaces, thereby enhancing the quality and yield of semiconductor devices.
Principle of Semiconductor Cleaning Equipment
These systems are integral to maintaining wafer cleanliness through various manufacturing steps, including before and after oxidation, chemical vapor deposition (CVD), and sputtering processes. Adequate cleaning is essential to minimize defects and ensure high-quality production.
Wet cleaning equipment typically engages a sequence of chemical baths followed by rinsing and drying steps, whereas dry cleaning methods might employ gases or plasma to achieve the desired cleanliness without liquid chemicals.
Types of Semiconductor Cleaning Equipment
Cleaning equipment varies by operational method and cleaning medium:
1. Classification by Cleaning Method
Batch Type: Processes multiple wafers simultaneously, with variations such as multi-vessel and single-vessel types depending on the chemical treatment sequence.
Single Wafer Type: Cleans wafers individually, often using nozzles to apply cleaning solutions while rotating the wafer for thorough coverage.
2. Classification by Cleaning Processing Method
Wet Type: Employs liquid chemicals for cleaning operations.
Dry Type: Uses gases or aerosols, avoiding liquid mediums.
Structure of Semiconductor Cleaning Equipment
Diverse structures cater to different cleaning methodologies:
1. Multi-Tank Batch Type
This configuration allows for sequential immersion and processing of wafers, suited for high-volume operations but requiring significant space and chemical usage.
2. Single Tank Batch Type
A more space-efficient approach using a single tank where chemicals are changed between processes, though it still necessitates considerable chemical consumption.
3. Single Wafer Type
Targets individual wafers with chemical sprays, minimizing solution use and contamination risk, though chemical recovery can be challenging due to dispersion.
How to Select Semiconductor Cleaning Equipment
Selection depends on the specific contaminants targeted for removal, with techniques varying for particles, organic residues, and metal impurities, such as microscopic dust, sodium molecules, oil and grease components contained in human sweat, and organic matter such as carbon molecules and metal atoms contained in chemicals used in the factory. Each contaminant type may require different cleaning strategies, from physical brushing and alkaline washes for particles to acidic and ozone treatments for organic and metal contaminants, respectively.
List of 10 Semiconductor Cleaning Equipment Manufacturers
*Including some distributors, etc.
Sort by Features
- Default
- Company Size: largest first
- Year Founded: oldest first
- Year Founded: earliest first
Sort by Area
- United States of America
- Germany
- Japan
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Ransohoff
Semiconductor Cleaner
Manufacturer Overview
Ransohoff was founded in 1916 and is located in Cincinnati, Ohio. Today, the company is a division of Cleaning Technologies Group. Cleaning Technologies Group is a provider of innovative process technologies to precision and industrial global manufacturing markets. Ransohoff is a manufacturer of aqueous and solvent-based parts cleaning systems as well as a complete line of recyclable aqueous chemistries and waste minimization technologies. The company serves market sectors including electrical components, optics, general manufacturing, heavy-duty trucks, and off-road vehicles. The company offers industrial parts washers, ultrasonic and megasonic cleaning systems, benchtop cleaning systems, and electronic cleaning systems.
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C&D Semiconductor Services Inc
C&D Wafer Scrubber and Cleaning Module
Manufacturer Overview
C&D Semiconductor Services Inc. is a manufacturer of semiconductor equipment founded in 1989 and headquartered in San Jose, California. The company specializes in wafer handling, processing, and inspection requirements in semiconductor manufacturing. It offers wafer-on-tape frames, wafer alloy annealing, wafer sorters, and wafer cleaners. It also provides photoresist coating, metal lift-off systems, microscope loaders, and optical edge bead exposure systems. The company’s products and technologies find applications in photoresist development, spray coating, thin film development, and bioscience.
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Modutek Corporation
SILICON WAFER CLEANING EQUIPMENT
Manufacturer Overview
Modutek Corporation, established in 1980 and headquartered in San Jose, California, is a manufacturer specializing in semiconductor wet process equipment and wet bench stations. The company offers an extensive and diverse product portfolio that includes vacuum metal etcher wet process equipment, rotary wafer etching systems, quartz tube cleaning stations, stainless steel solvent stations, and nitride etch baths wet process equipment. These advanced equipment solutions are integral to various semiconductor applications, including silicon wafer cleaning, wafer processing time improvement, and silicon nitride strip processes for the removal of silicon nitride using a hot acid bath.
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Samco Inc
Surface Treatment
Manufacturer Overview
Samco Inc, founded in 1979 and headquartered in Kyoto, Japan, is a manufacturer and supplier specializing in semiconductor and electronic component manufacturing systems. The company's product portfolio includes low-stress chemical vapor deposition systems, atomic layer deposition systems, reactive ion etching systems, plasma cleaners, and Aqua Plasma Cleaners. These products are applied in various industries, including semiconductor manufacturing, the electronics industry, optoelectronics, photonics, and biotechnology. The company has office locations overseas, including China, the USA, Singapore, Malaysia, and Liechtenstein.
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TAZMO CO.,LTD.
Semiconductor Wet Processer
Manufacturer Overview
TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced manufacturing equipment and systems. Its products cover a diverse spectrum, including semiconductor manufacturing tools, nanoimprint solutions, FPD manufacturing equipment, clean transfer systems, and precision molding dies. These offerings cater to various industries, enhancing semiconductor manufacturing efficiency. The company's products meets rigorous industry standards and regulations, underscoring its adherence to quality and precision.
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SHIBAURA MECHATRONICS CORPORATION
single-wafer cleaning equipment
Manufacturer Overview
Shibaura Mechatronics Corporation, established in 1939 and headquartered in Yokohama, Japan, is a manufacturer and supplier of various production equipment. Its product line encompasses FPD manufacturing equipments that include array process, cell process, and module process equipment. ALso offered are semiconductor manufacturing equipment, vacuum equipment, and other equipment used in applications related to manufacturing equipment. The company also develops and manufactures vending machines compatible with numerous electronic payment systems, including credit cards and electronic money.
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SCREEN Holdings Co., Ltd.
single-wafer cleaner
Manufacturer Overview
SCREEN Holdings Co., Ltd., founded in 1943 and based in Kyoto, Japan, is a manufacturer and seller of semiconductors, graphic arts, display production, deposition and much more. The company provides a wide range of products including semiconductor production equipment for smartphones, consumer electronics, and much more, displays for digital devices, PCB-related equipment for mobile phones & vehicle systems, and more. The company serves various industries such as pharmaceuticals, energy, and IT among others. It holds the ISO 9001, ISO 13485, ISO 2231, and ISO 1400 certifications among others.
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ACM Research, Inc.
wafer wet cleaning system
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The Max Planck Institute for Marine Microbiology
Wafer Cleaning Machine
Distributor Overview
The Max Planck Institute for Marine Microbiology was founded in 1992 and is a researcher and supplier of products and services to the scientific community, headquartered in Bremen, Germany. The institute specializes in research related to the diversity and function of marine microorganisms, interactions in the marine environment, and the impact of climate change. It provides access to research laboratories, specialized equipment, and educational and training programs. MPIMM is a part of the Max Planck Society and caters to the general public, academic research, biotechnology, pharmaceutical, and energy industries.
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Semiconductor Cleaning Equipment Manufacturer Ranking
*Including some distributors, etc.Ranking as of April 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Modutek Corporation |
25.4%
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| 2 | ACM Research, Inc. |
17.4%
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| 3 | Ransohoff |
15.5%
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| 4 | C&D Semiconductor Services Inc |
8.9%
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| 5 | The Max Planck Institute for Marine Microbiology |
8.0%
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| 6 | AXUS TECHNOLOGY |
6.1%
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| 7 | TAZMO CO.,LTD. |
5.6%
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| 8 | Samco Inc |
4.7%
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| 9 | SCREEN Holdings Co., Ltd. |
4.2%
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| 10 | SHIBAURA MECHATRONICS CORPORATION |
3.8%
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Derivation Method
The ranking is calculated based on the click share within the semiconductor cleaning equipment page as of April 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
- SHIBAURA MECHATRONICS CORPORATION: 1,221
- Samco Inc: 173
Newly Established Company
- The Max Planck Institute for Marine Microbiology: 1992 (32 years ago)
- Modutek Corporation: 1980 (44 years ago)
- Samco Inc: 1979 (45 years ago)
Company with a History
- TAZMO CO.,LTD.: 1972 (52 years ago)
- Samco Inc: 1979 (45 years ago)
- Modutek Corporation: 1980 (44 years ago)
Semiconductor Cleaning Equipment Manufacturers in United States
*Including some distributors, etc.
Global Distribution of Semiconductor Cleaning Equipment Manufacturers by Country
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
United States of America
|
4 | 44.4% |
Japan
|
4 | 44.4% |
Germany
|
1 | 11.1% |
