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  4. Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ® (TAZMO CO.,LTD.)
Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®-CENOTE®
Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®-TAZMO CO.,LTD.

Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®
TAZMO CO.,LTD.

About This Product

Single wafer cleaning system CENOTE ® is a multi-functional single wafer cleaning device that uses a multi-cup method. By continuously supplying clean liquid to the wafer surface and precisely controlling the type of chemical, mixing ratio, flow rate, and temperature, it achieves high-cleanliness cleaning and precision etching.

■Product features

·platform Since both sides of the wafer can be processed simultaneously, contamination of the backside of the wafer can be prevented and post-processing of the backside of the wafer can be omitted. High throughput is achieved using the multi-cup method and continuous multiple processing in each cup. It is a device with excellent cost performance. ・Process unit We have a processing module for acidic chemicals, a processing module for alkaline chemicals, and a processing module for organic chemicals, and can accommodate equipment configurations tailored to customer needs. It can also be equipped with two-fluid type spray nozzles and ultrasonic spray nozzles, and is compatible with 8" and 12" diameters. ・Easy to operate It has an interface with excellent visibility.

  • Product

    Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®

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1 Models of Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®

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Semiconductor manufacturing equipment Cleaning equipment Single wafer etching/cleaning system CENOTE ®-Part Number-CENOTE®

CENOTE®

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Φ200 & 300mm wafer

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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