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  4. Ashing device Luminous NA series (ULVAC Sales Co., Ltd.)
Ashing device Luminous NA series-Luminous NA-8000
Ashing device Luminous NA series-ULVAC Sales Co., Ltd.

Ashing device Luminous NA series
ULVAC Sales Co., Ltd.

About This Product

■Summary

The Luminous NA series is a wafer size-free ashing system that can handle a wide range of processes from critical next-generation wafer processes to wafer-level mounting processes.

■Applications

・Ion implant removal process (1 x 1,016atoms/cm2 or more) and polymer removal in front-end process ・Wafer process that requires CF4 addition process (electronic components/LED) ・Chip size packaging and BUMP process ・CCD color filter manufacturing process

■Features

・Ion implant stripping process and polymer removal process of 1x1,016 atoms/cm2 or more required for critical next-generation wafer processes can be realized without damage. ・The chamber configuration is optimal for the F-based gas addition process, making it particle-free. Therefore, it is possible to construct a wide range of processes, from normal PR to ion implant peeling, organic film peeling (PI, DFR, etc.) peeling, and oxide film etching. ・Using a simple device configuration, we have achieved "excellent maintenance and reliability" and "low cost" at the same time. - Flexible chamber configurations are possible (μwave, RIE, μwave + RIE), allowing for a wide variety of transport routes to be selected. - Wafer size can be changed only by recipe settings, making it very easy to change wafer size.

  • Product

    Ashing device Luminous NA series

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1 Models of Ashing device Luminous NA series

Image Part Number Price (excluding tax) Compatible wafer size
Ashing device Luminous NA series-Part Number-Luminous NA-8000

Luminous NA-8000

Available upon quote

100mm,125mm,150mm and 200mm

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About Company Handling This Product

ULVAC Sales Co., Ltd.

  • Japan

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