Batch type natural oxide film removal equipment RISETM-300
ULVAC Sales Co., Ltd.
About This Product
■Summary
The batch type natural oxide film removal device RISETM-300 is a batch type pre-clean device that can remove difficult natural oxide films such as those from the bottom of deep-contact LSIs. We have a lineup of target wafers of 200mm and 300mm.
■Applications
・Pre-treatment when forming self-aligned contacts
・Pretreatment during capacitor formation
・Pretreatment during epitaxial growth
・Pretreatment of Co (Ni) salicide
■Features
・Achieving high throughput and low CoO
・Good etching uniformity (<±5%/batch) and reproducibility
・Dry process
・Damage free (remote plasma and low temperature process)
・Reduced resistance of self-aligned contact to 1/2 that of conventional wet process
・Flexible equipment layout
・Emphasis on maintainability (side maintenance free)
・Batch processing of 50 300mm wafers at once
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Product
Batch type natural oxide film removal equipment RISETM-300
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Batch type natural oxide film removal equipment RISETM-300
| Product Image | Part Number | Price (excluding tax) | Application | Board size | Board stage | Compressed air | Control system | Cooling water for DRP/chiller | Cooling water for this machine | Device configuration | Exhaust Gas box exhaust (combustible gas side) | Exhaust Gas box exhaust (combustion supporting gas side) | Exhaust main unit | Exhaust pump rack exhaust | Exhaust system | Gas introduction system | Main power supply 1 | Main power supply 2 | Nitrogen gas | Plasma source | Process gas | Pump rack |
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RISETM-300 |
Available upon quote | Pretreatment for SAC, capacitor, and epitaxial growth salicide formation | Φ300mm | Ceramic boat (50 pieces/batch) | 0.4~0.7MPa | FAPC+TFT touch panel |
0.2~0.5MPa Water temperature 20~25℃ Flow rate 15L/min |
0.2~0.5MPa Water temperature 20~25℃ Flow rate 20L/min x 2 systems |
EFEM+LL+PM | 2.0m3/min | 0.3m3/min | 20m3/min | 10.5m3/min | Mechanical booster pump + DRP | 3 systems | AC±208V, 50/60Hz, 3φ118A, 41kVA | AC±208V, 50/60Hz, 3φ83A, 28.6kVA | 0.6~0.9MPa | Microwave power supply | 0.6~0.9MPa | AC200V, 50/60Hz, 3φ86.5A, 30kVA |
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About Company Handling This Product
- Japan