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  1. Metoree
  2. Machining / Machine Tools
  3. Sputtering Equipment
  4. Batch type sputtering equipment SV series (ULVAC Sales Co., Ltd.)
Batch type sputtering equipment SV series-SV-200
Batch type sputtering equipment SV series-ULVAC Sales Co., Ltd.

Batch type sputtering equipment SV series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, and the carousel type, which can process large quantities of substrates.

■Applications

Deposition of electrode films, insulating films, and dielectric films on various substrates

■Features

・SV-4540, 6040, and 9045 are carousel type and can handle a large amount of substrates, making them ideal for small to medium scale or low-volume, high-mix production. ・SV-200 Disc stamper Specialized equipment for Ni film formation, ultra-compact, fully automatic, and high throughput.

  • Product

    Batch type sputtering equipment SV series

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1 Models of Batch type sputtering equipment SV series

Image Part Number Price (excluding tax) Standard exhaust system Deposition area Uniformity Stationary Rotating Substrate heating Control system Ultimate pressure Depot direction
Batch type sputtering equipment SV series-Part Number-SV-200

SV-200

Available upon quote

8" cryopump

Φ200mm ± 5%

None

Automatic

6.7e-5Pa

Side

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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