Batch type sputtering equipment SV series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The SV series is a vertical batch type sputtering device. There is the SV-200, which is dedicated to disk stampers, and the carousel type, which can process large quantities of substrates.
■Applications
Deposition of electrode films, insulating films, and dielectric films on various substrates
■Features
・SV-4540, 6040, and 9045 are carousel type and can handle a large amount of substrates, making them ideal for small to medium scale or low-volume, high-mix production.
・SV-200 Disc stamper Specialized equipment for Ni film formation, ultra-compact, fully automatic, and high throughput.
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Product
Batch type sputtering equipment SV series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Batch type sputtering equipment SV series
| Product Image | Part Number | Price (excluding tax) | Control system | Deposition area Uniformity Stationary Rotating | Depot direction | Standard exhaust system | Substrate heating | Ultimate pressure |
|---|---|---|---|---|---|---|---|---|
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SV-200 |
Available upon quote | Automatic | Φ200mm ± 5% | Side | 8" cryopump | None | 6.7e-5Pa |
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About Company Handling This Product
- Japan