Sputtering equipment SMD series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a rich track record of delivering over 1000 units of the SMD series alone, and are operating under a variety of production environments. We reflect feedback received from production sites in a timely manner to further improve reliability.
■Applications
・Color filter
・Displays (TFT, smartphones, flat-screen TVs (2K, 4K), OLED)
■Features
・Low particles due to substrate only transportation and side deposition method
・Space-saving design
・Easy to manage individual substrates such as film forming conditions
・Cathode lineup according to film forming materials
・Supports a wide range of film forming processes supported by a wealth of experience and data
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Product
Sputtering equipment SMD series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Sputtering equipment SMD series
| Product Image | Part Number | Price (excluding tax) | Board size (mm) | Board transfer system | Heating chamber | High vacuum exhaust system | Model | Preparation/removal room | Sputtering room | Transfer room | Type |
|---|---|---|---|---|---|---|---|---|---|---|---|
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SMD-950X |
Available upon quote | 730X920 | 1 or 2 tier arm | 1 | Cryopump or turbomolecular pump | G4.5 | 2 | 2 (Up to 3 cathodes) | 1 | X-type |
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About Company Handling This Product
- Japan