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  2. Machining / Machine Tools
  3. Sputtering Equipment
  4. Sputtering equipment SMD series (ULVAC Sales Co., Ltd.)
Sputtering equipment SMD series-SMD-950X
Sputtering equipment SMD series-ULVAC Sales Co., Ltd.

Sputtering equipment SMD series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The SMD series is a single-wafer sputtering system that forms metal films, ITO, IGZO, dielectric films, etc. We have a rich track record of delivering over 1000 units of the SMD series alone, and are operating under a variety of production environments. We reflect feedback received from production sites in a timely manner to further improve reliability.

■Applications

・Color filter ・Displays (TFT, smartphones, flat-screen TVs (2K, 4K), OLED)

■Features

・Low particles due to substrate only transportation and side deposition method ・Space-saving design ・Easy to manage individual substrates such as film forming conditions ・Cathode lineup according to film forming materials ・Supports a wide range of film forming processes supported by a wealth of experience and data

  • Product

    Sputtering equipment SMD series

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1 Models of Sputtering equipment SMD series

Image Part Number Price (excluding tax) High vacuum exhaust system Transfer room Board transfer system Board size (mm) Model Heating chamber Preparation/removal room Type Sputtering room
Sputtering equipment SMD series-Part Number-SMD-950X

SMD-950X

Available upon quote

Cryopump or turbomolecular pump

1

1 or 2 tier arm

730X920

G4.5

1

2

X-type

2 (Up to 3 cathodes)

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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Sputtering Equipment　ULVAC Sales Co., Ltd.
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