Horizontal inline sputtering equipment SCH series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It is compatible with various film formation processes such as back electrode films and insulating films in solar cell production lines.
■Applications
Transparent conductive film for solar cells, back electrode film, precursor film, buffer film
■Features
・High reliability verified on numerous mass production lines
・Supports large substrates and various types of substrates
・Adoption of high rate & high efficiency cathode
- Compatible with a wide range of film formation methods (depot down/deposit up, DC/AC/RF sputtering)
・Simple and easy maintenance
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Product
Horizontal inline sputtering equipment SCH series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Horizontal inline sputtering equipment SCH series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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SCH series |
Available upon quote |
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About Company Handling This Product
- Japan