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  3. Sputtering Equipment
  4. Horizontal inline sputtering equipment SCH series (ULVAC Sales Co., Ltd.)
Horizontal inline sputtering equipment SCH series-SCH series
Horizontal inline sputtering equipment SCH series-ULVAC Sales Co., Ltd.

Horizontal inline sputtering equipment SCH series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The SCH series is a horizontal in-line sputtering system that forms transparent conductive films, metal films, etc. It is compatible with various film formation processes such as back electrode films and insulating films in solar cell production lines.

■Applications

Transparent conductive film for solar cells, back electrode film, precursor film, buffer film

■Features

・High reliability verified on numerous mass production lines ・Supports large substrates and various types of substrates ・Adoption of high rate & high efficiency cathode - Compatible with a wide range of film formation methods (depot down/deposit up, DC/AC/RF sputtering) ・Simple and easy maintenance

  • Product

    Horizontal inline sputtering equipment SCH series

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1 Models of Horizontal inline sputtering equipment SCH series

Image Part Number Price (excluding tax)
Horizontal inline sputtering equipment SCH series-Part Number-SCH series

SCH series

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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