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  3. Sputtering Equipment
  4. Back side/mounting sputtering equipment SRH series (ULVAC Sales Co., Ltd.)
Back side/mounting sputtering equipment SRH series-SRH series
Back side/mounting sputtering equipment SRH series-ULVAC Sales Co., Ltd.

Back side/mounting sputtering equipment SRH series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation for power devices, WL-CSP, UBM, etc.

■Applications

・Power device ・WL-CSP (for electrolytic plating seed layer) ・UBM (barrier metal)

■Features

・Compatible with φ125~φ200mm substrates ・Supports ultra-thin wafers (compatible with automatic transfer of up to 50 μm thick) ・Supports up to 5 processes ・Can be equipped with sputter etching using ISM method ・Efficient cooling is possible with ESC

  • Product

    Back side/mounting sputtering equipment SRH series

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1 Models of Back side/mounting sputtering equipment SRH series

Image Part Number Price (excluding tax)
Back side/mounting sputtering equipment SRH series-Part Number-SRH series

SRH series

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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