Back side/mounting sputtering equipment SRH series
ULVAC Sales Co., Ltd.
About This Product
■Summary
The SRH series backside/mounting sputtering equipment is a mass production equipment intended for metal film formation for power devices, WL-CSP, UBM, etc.
■Applications
・Power device
・WL-CSP (for electrolytic plating seed layer)
・UBM (barrier metal)
■Features
・Compatible with φ125~φ200mm substrates
・Supports ultra-thin wafers (compatible with automatic transfer of up to 50 μm thick)
・Supports up to 5 processes
・Can be equipped with sputter etching using ISM method
・Efficient cooling is possible with ESC
-
Product
Back side/mounting sputtering equipment SRH series
-
Handling Company
ULVAC Sales Co., Ltd.
-
Categories
1 Models of Back side/mounting sputtering equipment SRH series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
SRH series |
Available upon quote |
Customers who viewed this product also viewed
![[MiniLab-GB] Glove box thin film experimental device MiniLab-026-GB-](https://metoree.s3.ap-northeast-1.amazonaws.com/img/products-new/3007428202411173.png)
Other products of ULVAC Sales Co., Ltd.
View more products of ULVAC Sales Co., Ltd.
About Company Handling This Product
- Japan