Multi-chamber sputtering equipment SME-200 series
ULVAC Sales Co., Ltd.
About This Product
■Summary
This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up to 7 200).
■Applications
・Electronic parts
・MEMS
・Power device
·LED
■Features
Capable of transporting φ200mm substrates
■A lineup of various modules as process rooms
・Dielectric module
・High-temperature film formation module
・Precision distribution module
・Etching module
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Product
Multi-chamber sputtering equipment SME-200 series
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Handling Company
ULVAC Sales Co., Ltd.
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Categories
1 Models of Multi-chamber sputtering equipment SME-200 series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
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SME-200 series |
Available upon quote |
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About Company Handling This Product
- Japan