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  2. Machining / Machine Tools
  3. Sputtering Equipment
  4. Multi-chamber sputtering equipment SME-200 series (ULVAC Sales Co., Ltd.)
Multi-chamber sputtering equipment SME-200 series-SME-200 series
Multi-chamber sputtering equipment SME-200 series-ULVAC Sales Co., Ltd.

Multi-chamber sputtering equipment SME-200 series
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

This is a multi-chamber sputtering system that can have multiple process chambers (up to 3 200E, up to 5 200J, and up to 7 200).

■Applications

・Electronic parts ・MEMS ・Power device ·LED

■Features

Capable of transporting φ200mm substrates

■A lineup of various modules as process rooms

・Dielectric module ・High-temperature film formation module ・Precision distribution module ・Etching module

  • Product

    Multi-chamber sputtering equipment SME-200 series

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Last viewed: 22 hours ago

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1 Models of Multi-chamber sputtering equipment SME-200 series

Image Part Number Price (excluding tax)
Multi-chamber sputtering equipment SME-200 series-Part Number-SME-200 series

SME-200 series

Available upon quote

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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Sputtering Equipment　ULVAC Sales Co., Ltd.
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