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  4. Source Scanning ion gun IS40E1 (Kitano Seiki Co., Ltd.)
Source Scanning ion gun IS40E1-IS40E1
Source Scanning ion gun IS40E1-Kitano Seiki Co., Ltd.

Source Scanning ion gun IS40E1
Kitano Seiki Co., Ltd.

Kitano Seiki Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

33.1hours

Relatively Fast Response

About This Product

■Summary

The 40E1 ion gun is a convergent ion gun that uses a two-stage exit lens. The spot size and accelerating voltage (0.15eV to 5keV) can be easily changed using the two-stage exit lens. In this case, the beam current value will be 250μA/cm2. The tip of the ion gun is tapered to 50º to avoid interference with other products. The filament mounting position of this ion gun is designed off-axis from the line of the incident ion beam to the sample surface to avoid contamination inside the gun. This has resulted in an ion gun that has a long life and does not require adjustment. Yttrium-coated iridium filaments operate at lower temperatures than other cathodes. It also allows the introduction of active gases such as oxygen, hydrogen, and hydrocarbons. The scanning range is 10 x 10 mm at a working distance of 23 mm, allowing for uniform sputtering. This allows accurate depth analysis.

■Features

・Full software operation ・2-stage differential exhaust ・Can also be used for active gases such as oxygen, hydrogen, and hydrocarbons ・Ion gun can be operated under ultra-high vacuum ・Win mass filter can be installed ・The ion beam spot diameter can be easily adjusted using the two-stage exit lens.

  • Product

    Source Scanning ion gun IS40E1

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1 Models of Source Scanning ion gun IS40E1

Image Part Number Price (excluding tax) Current density Scanning range Source length in vacuum Minimum spot size Mounting flange Acceleration voltage Working distance Bake temperature
Source Scanning ion gun IS40E1-Part Number-IS40E1

IS40E1

Available upon quote

250μA/cm2

10×10mm on sample

163mm (standard)

0.6mm

DN40CF (rotation)

0.15~5keV

23~100mm

250℃ or less

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About Company Handling This Product

Kitano Seiki Co., Ltd.

Response Rate

100.0%

Response Time

33.1hrs

  • Japan

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