Source Scanning ion gun IS40E1
Kitano Seiki Co., Ltd.
About This Product
■Summary
The 40E1 ion gun is a convergent ion gun that uses a two-stage exit lens. The spot size and accelerating voltage (0.15eV to 5keV) can be easily changed using the two-stage exit lens. In this case, the beam current value will be 250μA/cm2. The tip of the ion gun is tapered to 50º to avoid interference with other products.
The filament mounting position of this ion gun is designed off-axis from the line of the incident ion beam to the sample surface to avoid contamination inside the gun. This has resulted in an ion gun that has a long life and does not require adjustment. Yttrium-coated iridium filaments operate at lower temperatures than other cathodes.
It also allows the introduction of active gases such as oxygen, hydrogen, and hydrocarbons. The scanning range is 10 x 10 mm at a working distance of 23 mm, allowing for uniform sputtering. This allows accurate depth analysis.
■Features
・Full software operation
・2-stage differential exhaust
・Can also be used for active gases such as oxygen, hydrogen, and hydrocarbons
・Ion gun can be operated under ultra-high vacuum
・Win mass filter can be installed
・The ion beam spot diameter can be easily adjusted using the two-stage exit lens.
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Product
Source Scanning ion gun IS40E1
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Handling Company
Kitano Seiki Co., Ltd.
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Categories
1 Models of Source Scanning ion gun IS40E1
| Product Image | Part Number | Price (excluding tax) | Acceleration voltage | Bake temperature | Current density | Minimum spot size | Mounting flange | Scanning range | Source length in vacuum | Working distance |
|---|---|---|---|---|---|---|---|---|---|---|
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IS40E1 |
Available upon quote | 0.15~5keV | 250℃ or less | 250μA/cm2 | 0.6mm | DN40CF (rotation) | 10×10mm on sample | 163mm (standard) | 23~100mm |
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About Company Handling This Product
- Japan