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Load-lock type carousel type sputtering equipment SPC-2507Handling Company
Sanko Ematech Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Power capacity | Number of axes: For φ4 | Number of axes: For φ3 | Installation dimensions | Equipment weight | Film thickness distribution between trays | Film thickness distribution inside tray | Exhaust time Loading/unloading room | Exhaust pump | Effective film formation range φ4 | Effective film formation range φ3 | Substrate heating temperature | Board tray φ4 | Board tray φ3 | Ultimate pressure | Number of sheets processed φ4 | Number of sheets processed φ3 | Processing method | Number of processing batches φ4 | Number of processing batches φ3 | Manufacturer | Cathode | Number of wafers: For φ4 | Number of wafers for φ3 |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
SPC-2507 |
Available upon quote |
AC200~220V/17kVA (50A) |
9 axes |
12 axes |
W1,280mm×D1,150mm×H1,873mm |
1,500kg |
±2% |
±2% |
Within 2 minutes to 1.0×101Pa |
Oil rotary pump + cryopump |
Tray W100mm |
Tray W75mm |
Confirmed over 150℃ |
Tray W120×L200mm |
Tray W90mm x L200mm |
1.0×10-3Pa or less (all rooms exhausted) |
424 sheets/day (assuming 22 hour operation) |
512 sheets/day (assuming 22 hour operation) |
Load-lock carousel type |
47 batches/day (assuming 22 hour operation) |
42 batches/day (assuming 22 hour operation) |
Showa Vacuum Co., Ltd. |
5 inches x 7 inches 2 sets |
9 pieces |
12 pieces |
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Reviews shown here are reviews of companies.
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