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  4. A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE (Oxford Instruments Ltd.)
A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-PlasmaPro 800 RIE
A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-Oxford Instruments Ltd.

A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE
Oxford Instruments Ltd.

About This Product

■Summary

The PlasmaPro 800 RIE provides a flexible solution for reactive ion etching (RIE) processes for large wafer batches and 300mm wafers in a compact footprint and open load system. A large wafer table enables production-level batch processing and handling of 300mm wafers. Provides maximum process flexibility in compound semiconductor, optoelectronics, and photonics applications.

■Features

・High performance process ・Excellent substrate temperature control ・High precision process control ・Proven 300mm single wafer failure analysis process ・Large electrode: low cost of ownership ・Etching Endpoint detection: Reliability and serviceability - Endpoint detection by laser interferometry and/or emission spectroscopy: can also be installed to enhance etch control ・4-, 8- or 12-line gas pod options: Flexible process and process gas options, allowing installation in service areas away from regular process tools ・Closed couple turbo pump: high pumping speed and excellent base pressure ・Data logger: Acquisition of traceability and history of chamber and process conditions ・Liquid-cooled or electrically heated electrodes: excellent electrode temperature control and stability

  • Product

    A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE

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1 Models of A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE

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A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-Part Number-PlasmaPro 800 RIE

PlasmaPro 800 RIE

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Oxford Instruments Ltd.

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