All Categories

History

  1. Metoree
  2. Machining / Machine Tools
  3. Plasma Etching Systems
  4. A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE (Oxford Instruments Ltd.)
A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-PlasmaPro 800 RIE
A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-Oxford Instruments Ltd.

A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE
Oxford Instruments Ltd.

Oxford Instruments Ltd.'s Response Status

Response Rate

100.0%

Response Time

26.3hours

Relatively Fast Response

About This Product

■Summary

The PlasmaPro 800 RIE provides a flexible solution for reactive ion etching (RIE) processes for large wafer batches and 300mm wafers in a compact footprint and open load system. A large wafer table enables production-level batch processing and handling of 300mm wafers. Provides maximum process flexibility in compound semiconductor, optoelectronics, and photonics applications.

■Features

・High performance process ・Excellent substrate temperature control ・High precision process control ・Proven 300mm single wafer failure analysis process ・Large electrode: low cost of ownership ・Etching Endpoint detection: Reliability and serviceability - Endpoint detection by laser interferometry and/or emission spectroscopy: can also be installed to enhance etch control ・4-, 8- or 12-line gas pod options: Flexible process and process gas options, allowing installation in service areas away from regular process tools ・Closed couple turbo pump: high pumping speed and excellent base pressure ・Data logger: Acquisition of traceability and history of chamber and process conditions ・Liquid-cooled or electrically heated electrodes: excellent electrode temperature control and stability

  • Product

    A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE

Share this product


190+ people viewing

Last viewed: 16 hours ago

Free
Get started with our free quotation service - no cost, no obligation.

No Phone Required
We respect your privacy. You can receive quotes without sharing your phone number.

1 Models of A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE

Image Part Number Price (excluding tax)
A flexible solution for RIE processes in a compact footprint and open load system PlasmaPro 800 RIE-Part Number-PlasmaPro 800 RIE

PlasmaPro 800 RIE

Available upon quote

Customers who viewed this product also viewed

Reviews shown here are reviews of companies.

CPE-200ahm with vacuum plasma etcher heating mechanism-SAKIGAKE-Semiconductor

CPE-200ahm with vacuum plasma etcher heating mechanism

SAKIGAKE-Semiconductor

260+ people viewing

Last viewed: 15 hours ago

Response time: 120.00 hours

Plasma Etching Systems

2 models listed

Plasma processing device multi -chamber ICP etching device-SHINKO SEIKI CO., LTD.

Plasma processing device multi -chamber ICP etching device

SHINKO SEIKI CO., LTD.

370+ people viewing

Last viewed: 7 hours ago

Plasma Etching Systems

4 models listed

Vacuum Plasma Etcher Semi-Auto Series CPE-S Series-SAKIGAKE-Semiconductor

Vacuum Plasma Etcher Semi-Auto Series CPE-S Series

SAKIGAKE-Semiconductor

260+ people viewing

Last viewed: 17 hours ago

Response time: 120.00 hours

Plasma Etching Systems
Plasma etching device EXAM-SHINKO SEIKI CO., LTD.

Plasma etching device EXAM

SHINKO SEIKI CO., LTD.

350+ people viewing

Last viewed: 5 hours ago

Plasma Etching Systems

4 models listed

High density plasma device SWP-SHINKO SEIKI CO., LTD.

High density plasma device SWP

SHINKO SEIKI CO., LTD.

310+ people viewing

Last viewed: 16 hours ago

Plasma Etching Systems

2 models listed

Vacuum Plasma Etcher CPE Series-SAKIGAKE-Semiconductor

Vacuum Plasma Etcher CPE Series

SAKIGAKE-Semiconductor

260+ people viewing

Last viewed: 13 hours ago

Response time: 120.00 hours

Plasma Etching Systems

2 models listed

ICP Plasma etching device Serio-SHINKO SEIKI CO., LTD.

ICP Plasma etching device Serio

SHINKO SEIKI CO., LTD.

260+ people viewing

Last viewed: 15 hours ago

Plasma Etching Systems

2 models listed

PlasmaPro 80 RIE provides versatile etch and deposition solutions with an easy-to-use atmospheric charging method-Oxford Instruments Ltd.

PlasmaPro 80 RIE provides versatile etch and deposition solutions with an easy-to-use atmospheric charging method

Oxford Instruments Ltd.

230+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Plasma Etching Systems

4 models listed

A flexible solution for plasma-enhanced chemical vapor deposition processes PlasmaPro 800 PECVD-Oxford Instruments Ltd.

A flexible solution for plasma-enhanced chemical vapor deposition processes PlasmaPro 800 PECVD

Oxford Instruments Ltd.

250+ people viewing

Last viewed: 37 minutes ago

Response time: 26.30 hours

Plasma Etching Systems

3 models listed

Achieves smooth surfaces with low damage PlasmaPro 100 ALE Atomic Layer Etching System-Oxford Instruments Ltd.

Achieves smooth surfaces with low damage PlasmaPro 100 ALE Atomic Layer Etching System

Oxford Instruments Ltd.

240+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Plasma Etching Systems

3 models listed

Achieving high-speed etching rates PlasmaPro 100 Cobra ICP RIE etching system-Oxford Instruments Ltd.

Achieving high-speed etching rates PlasmaPro 100 Cobra ICP RIE etching system

Oxford Instruments Ltd.

380+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Plasma Etching Systems

3 models listed

Platform for DRIE applications PlasmaPro 100 Estrelas DRIE-Oxford Instruments Ltd.

Platform for DRIE applications PlasmaPro 100 Estrelas DRIE

Oxford Instruments Ltd.

260+ people viewing

Last viewed: 5 hours ago

Response time: 26.30 hours

Plasma Etching Systems

3 models listed

See More Plasma Etching Systems Products

Other products of Oxford Instruments Ltd.

Reviews shown here are reviews of companies.

1000 Series Glass X-ray Tubes Ideal for Use with Integrated X-ray Sources-Oxford Instruments Ltd.

1000 Series Glass X-ray Tubes Ideal for Use with Integrated X-ray Sources

Oxford Instruments Ltd.

330+ people viewing

Response time: 26.30 hours

X-ray Tubes

3 models listed

1500 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications-Oxford Instruments Ltd.

1500 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications

Oxford Instruments Ltd.

440+ people viewing

Last viewed: 7 hours ago

Response time: 26.30 hours

X-ray Tubes

9 models listed

1501 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications-Oxford Instruments Ltd.

1501 series glass X-ray tube ideal for industrial inspection and non-destructive testing applications

Oxford Instruments Ltd.

280+ people viewing

Response time: 26.30 hours

X-ray Tubes

2 models listed

1550 Series Glass X-ray Tube Ideal for Industrial and Non-Destructive Testing-Oxford Instruments Ltd.

1550 Series Glass X-ray Tube Ideal for Industrial and Non-Destructive Testing

Oxford Instruments Ltd.

350+ people viewing

Response time: 26.30 hours

X-ray Tubes

4 models listed

3000 series 30kV X-ray tube ideal for continuous operation-Oxford Instruments Ltd.

3000 series 30kV X-ray tube ideal for continuous operation

Oxford Instruments Ltd.

460+ people viewing

Last viewed: 3 hours ago

Response time: 26.30 hours

X-ray Tubes

10 models listed

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope-Oxford Instruments Ltd.

Specifying the sample observation location and positioning the cantilever is possible alpha300A–AFM atomic force microscope

Oxford Instruments Ltd.

260+ people viewing

Last viewed: 14 seconds ago

Response time: 26.30 hours

Atomic Force Microscopes
Easy way to start Raman alpha300access – Entry model Raman microscope-Oxford Instruments Ltd.

Easy way to start Raman alpha300access – Entry model Raman microscope

Oxford Instruments Ltd.

190+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Experience a new level of automation alpha300apyron – Automated Raman Imaging Microscopy-Oxford Instruments Ltd.

Experience a new level of automation alpha300apyron – Automated Raman Imaging Microscopy

Oxford Instruments Ltd.

240+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Establishing a firm position alpha300R – Raman imaging microscope-Oxford Instruments Ltd.

Establishing a firm position alpha300R – Raman imaging microscope

Oxford Instruments Ltd.

300+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Observe shape images and Raman images with one device alpha300 RA – AFM Raman combined device-Oxford Instruments Ltd.

Observe shape images and Raman images with one device alpha300 RA – AFM Raman combined device

Oxford Instruments Ltd.

260+ people viewing

Last viewed: 8 hours ago

Response time: 26.30 hours

Raman Microscopes
Balor sCMOS sCMOS camera series ideal for measuring photometry and astronomical fluctuations on time scales from milliseconds to tens of seconds-Oxford Instruments Ltd.

Balor sCMOS sCMOS camera series ideal for measuring photometry and astronomical fluctuations on time scales from milliseconds to tens of seconds

Oxford Instruments Ltd.

230+ people viewing

Response time: 26.30 hours

Complementary Metal Oxide Semiconductor (CMOS) Cameras
Intuitive and easy-to-use nanoelectrical workflow ErgoAFM software-Oxford Instruments Ltd.

Intuitive and easy-to-use nanoelectrical workflow ErgoAFM software

Oxford Instruments Ltd.

160+ people viewing

Last viewed: 3 hours ago

Response time: 26.30 hours


View more products of Oxford Instruments Ltd.

About Company Handling This Product

Oxford Instruments Ltd.

Response Rate

100.0%

Response Time

26.3hrs

  • Japan

Related search keywords

Plasma Etching Systems
Plasma Etching Systems　Oxford Instruments Ltd.
Oxford Instruments Ltd.

This is the version of our website addressed to speakers of English in the United States. If you are a resident of another country, please select the appropriate version of Metoree for your country in the drop-down menu.

Copyright © 2024 Metoree