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Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Heliinspect H8
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Links Inc.

Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect
Links Inc.


About This Product

HELIOTIS's light -interfere faucer measurement 3D sensor measures the three -dimensional shape of the object with high accuracy of Submicron. Heliinspect, an integrated stage, was developed from the request to perform a three -dimensional test online. A unique CMOS sensor that allows each sensor to perform advanced calculation processing can make high -accuracy and high -speed three -dimensional measurements.

■ Functional features

HELIOTIS's light -interfere faucer measurement 3D sensor measures the three -dimensional shape of the object with high accuracy of Submicron. Heliinspect, an integrated stage, was developed from the request to perform a three -dimensional test online. A unique CMOS sensor that allows each sensor to perform advanced calculation processing can make high -accuracy and high -speed three -dimensional measurements.

■ High precision measurement without contact

Heliinspect is a three -dimensional sensor based on white interference that enables high -precision measurement of submichron. The H8 series can be measured with several tens of nm accuracy.

■ Small and easy to put in

Heliinspect is packaged with ultra -high -speed sensors, light sources and optical systems to small modules. Because it is robust and easy to install, it can be easily used for various purposes, such as R & D and inline tests.

■ High -speed 3D measurement

3D measurement of nano -order is possible in about 0.5 seconds per shot. The sensor that performs ultra -high -speed data processing within the element achieves dramatic measurement time while keeping the accuracy of white interferometer as it is.

■ Wide use

It is also possible to accurately measure the surface of the transparent liquid surface, glass, and the highly reflective mirror target, which were difficult with normal image processing. It can be applied to a wide range of fields, such as solder ball shape inspection, coplanality test, lens surface inspection, and membrane inspection.

■ Applicable field

・ Step -changing height, angle, shape measurement ・ Swell on the surface, roughness measurement ・ Defective detection such as scratches and dirt ・ Measurement of surface flatness and deformation rate ・ Measurement of thickness of films for several NM orders (fault mode)

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    Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect

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4 Models of Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Horizontal resolution (µm) Vision (mm) Lens magnification WD (mm) Z Stage Encoder Resolution body size software Horizontal decomposition ability
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Part Number-Heliinspect H8

Heliinspect H8

Available upon quote

・ H8: 0.24, 0.48, 1.2, 2.4, 3, 6, 12
・ H8m: 0.12, 0.24, 0.6, 1.2, 1.5, 3, 6

0.13 × 0.12, 0.26 × 0.25, 0.65 × 0.61, 1.3 × 1.2, 1.6 × 1.5, 3.2 × 3.1, 6.5 × 6.1

100x, 50x, 20x, 10x, 8x, 4x, 2x

2 (Nikon), 3.4 (Nikon) 2.5 (Leica), 4.7 (Nikon) 3.6 (Leica), 7.4 (Nikon) 3.6 (Leica), 12.8, 42.9, 43

20nm (standard model), 1Nm (high -precision model)

H254mm x W100mm x D58mm

Embedded SDK (Halcon, C ++, LabView, Python)

-
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Part Number-Heliinspect H9

Heliinspect H9

Available upon quote

・ H9: 0.24, 0.48, 1.2, 2.4, 3, 6, 12
・ H9m: 4, 6, 8, 12, 15, 24

4.10 × 4.35, 6.14 × 6.53, 8.19 × 8.70, 12.29 × 13.06, 15.36 × 16.32, 24.58 × 26.11

3x, 2x, 1.5x, 1x, 0.8x, 0.5x

・ Type S: 49, 49, 51, 51, 51, 51
・ Type L: 110, 113, 113, 113

100nm

・ Type S: H300mm x W216mm x D116mm (including external Z stage)
・ Type L: H342mm x W221mm x D116mm (including external Z stage)

Embedded SDK (Halcon, C ++, LabView, Python)

-
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Part Number-Heliinspect H6

Heliinspect H6

Available upon quote -

0.22 × 0.23, 0.56 × 0.58, 1.12 × 1.17, 1.4 × 1.45, 2.8 × 2.9, 5.6 × 5.8

-

2.52mm, 3.57mm, 3.57mm, 14.1mm, 55.8mm, 56.6mm

100nm

H147mm x W75mm x D45mm

Embedded SDK (Halcon, C ++, LabView, Python)

0.8 μm, 2μm, 4μm, 5μm, 10 μm, 20 μm

Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect-Part Number-Heliinspect H4

Heliinspect H4

Available upon quote -

11.2 x 11.7

-

16.0mm

100nm

H197mm x W90mm x D48mm

Embedded SDK (Halcon, C ++, LabView, Python)

40 μm

Click on the part number for more information about each product

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