Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect
Links Inc.
About This Product
HELIOTIS's light -interfere faucer measurement 3D sensor measures the three -dimensional shape of the object with high accuracy of Submicron. Heliinspect, an integrated stage, was developed from the request to perform a three -dimensional test online. A unique CMOS sensor that allows each sensor to perform advanced calculation processing can make high -accuracy and high -speed three -dimensional measurements.
■ Functional features
HELIOTIS's light -interfere faucer measurement 3D sensor measures the three -dimensional shape of the object with high accuracy of Submicron. Heliinspect, an integrated stage, was developed from the request to perform a three -dimensional test online. A unique CMOS sensor that allows each sensor to perform advanced calculation processing can make high -accuracy and high -speed three -dimensional measurements.
■ High precision measurement without contact
Heliinspect is a three -dimensional sensor based on white interference that enables high -precision measurement of submichron. The H8 series can be measured with several tens of nm accuracy.
■ Small and easy to put in
Heliinspect is packaged with ultra -high -speed sensors, light sources and optical systems to small modules. Because it is robust and easy to install, it can be easily used for various purposes, such as R & D and inline tests.
■ High -speed 3D measurement
3D measurement of nano -order is possible in about 0.5 seconds per shot. The sensor that performs ultra -high -speed data processing within the element achieves dramatic measurement time while keeping the accuracy of white interferometer as it is.
■ Wide use
It is also possible to accurately measure the surface of the transparent liquid surface, glass, and the highly reflective mirror target, which were difficult with normal image processing. It can be applied to a wide range of fields, such as solder ball shape inspection, coplanality test, lens surface inspection, and membrane inspection.
■ Applicable field
・ Step -changing height, angle, shape measurement
・ Swell on the surface, roughness measurement
・ Defective detection such as scratches and dirt
・ Measurement of surface flatness and deformation rate
・ Measurement of thickness of films for several NM orders (fault mode)
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Product
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect
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Handling Company
Links Inc.
4 Models of Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Horizontal decomposition ability | Horizontal resolution (µm) | Lens magnification | Vision (mm) | WD (mm) | Z Stage Encoder Resolution | body size | software |
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Heliinspect H8 |
Available upon quote | - |
・ H8: 0.24, 0.48, 1.2, 2.4, 3, 6, 12 ・ H8m: 0.12, 0.24, 0.6, 1.2, 1.5, 3, 6 |
100x, 50x, 20x, 10x, 8x, 4x, 2x | 0.13 × 0.12, 0.26 × 0.25, 0.65 × 0.61, 1.3 × 1.2, 1.6 × 1.5, 3.2 × 3.1, 6.5 × 6.1 | 2 (Nikon), 3.4 (Nikon) 2.5 (Leica), 4.7 (Nikon) 3.6 (Leica), 7.4 (Nikon) 3.6 (Leica), 12.8, 42.9, 43 | 20nm (standard model), 1Nm (high -precision model) | H254mm x W100mm x D58mm | Embedded SDK (Halcon, C ++, LabView, Python) |
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Heliinspect H9 |
Available upon quote | - |
・ H9: 0.24, 0.48, 1.2, 2.4, 3, 6, 12 ・ H9m: 4, 6, 8, 12, 15, 24 |
3x, 2x, 1.5x, 1x, 0.8x, 0.5x | 4.10 × 4.35, 6.14 × 6.53, 8.19 × 8.70, 12.29 × 13.06, 15.36 × 16.32, 24.58 × 26.11 |
・ Type S: 49, 49, 51, 51, 51, 51 ・ Type L: 110, 113, 113, 113 |
100nm |
・ Type S: H300mm x W216mm x D116mm (including external Z stage) ・ Type L: H342mm x W221mm x D116mm (including external Z stage) |
Embedded SDK (Halcon, C ++, LabView, Python) |
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Heliinspect H6 |
Available upon quote | 0.8 μm, 2μm, 4μm, 5μm, 10 μm, 20 μm | - | - | 0.22 × 0.23, 0.56 × 0.58, 1.12 × 1.17, 1.4 × 1.45, 2.8 × 2.9, 5.6 × 5.8 | 2.52mm, 3.57mm, 3.57mm, 14.1mm, 55.8mm, 56.6mm | 100nm | H147mm x W75mm x D45mm | Embedded SDK (Halcon, C ++, LabView, Python) |
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Heliinspect H4 |
Available upon quote | 40 μm | - | - | 11.2 x 11.7 | 16.0mm | 100nm | H197mm x W90mm x D48mm | Embedded SDK (Halcon, C ++, LabView, Python) |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1990