Heliinspect H9 | Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect
Links Inc.
Price (excluding tax)
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Horizontal resolution (µm)
Lens magnification
Vision (mm)
WD (mm)
Z Stage Encoder Resolution
body size
software
Horizontal decomposition ability
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Part Number
Heliinspect H9
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Handling Company
Links Inc.
Ultra -high -speed optical interference fault image 3D measurement sensor Helilnspect Heliinspect H9's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Horizontal resolution (µm) | Lens magnification | Vision (mm) | WD (mm) | Z Stage Encoder Resolution | body size | software |
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Available upon quote | ・ H9: 0.24, 0.48, 1.2, 2.4, 3, 6, 12 ・ H9m: 4, 6, 8, 12, 15, 24 | 3x, 2x, 1.5x, 1x, 0.8x, 0.5x | 4.10 × 4.35, 6.14 × 6.53, 8.19 × 8.70, 12.29 × 13.06, 15.36 × 16.32, 24.58 × 26.11 | ・ Type S: 49, 49, 51, 51, 51, 51 ・ Type L: 110, 113, 113, 113 | 100nm | ・ Type S: H300mm x W216mm x D116mm (including external Z stage) ・ Type L: H342mm x W221mm x D116mm (including external Z stage) | Embedded SDK (Halcon, C ++, LabView, Python) |
There are 4 models for this product.
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About Company Handling This Product
- Japan
- Since 1990