High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
OVAL Corporation
About This Product
Measures / control the gas flow accurately on a mass base. The FHA series is a high -precision and compact gas flow meter. The FHB series is a flow controller that integrates the control valve (electromagnetic type) in the FHA series. These can be composed of a simple flow rate measurement / control system by combining with a leadout unit (ROU) with a built -in indicators and configurations.
It is ideal for gas flow measurement and control used in various gas supply systems, gasmixing processes, pilot plants, semiconductor manufacturing processes, and research institutes.
■ Main features
・ Cover the wide flow range from 5Nccm (ml/min [normal]) to 500nlm (L/min [normal)).
・ The optimal full scale adjustment is possible by the Reminar flow element.
・ It can be applied to most gas bodies other than high -corrosive caries.
・ Excellent responsiveness.
-The control valve used in the mass flow controller is a Normarclose type electromagnetic type, so it has a good response and can be used safely.
・ You can handle a variety of applications by combining with the lead out unit.
* There are other model numbers.
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Product
High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
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Handling Company
OVAL Corporation
10 Models of High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Body material | Body structure | Converter structure | Explosion -proof structure | Full scale flow rate | Input / output signal | Laws and regulations | Maximum use pressure | Model | Operating temperature limit | Process connection (body) | Special specifications | Sticker material | Temperature grade/ignition degree | Turndown | accuracy | connection | fluid | power supply | temperature | version |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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FHA00S-G0ctg -000-1MAA-1N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Fluorine rubber/FKM Biton | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHA00S-G0ctg -000-1MAA-1Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Fluorine rubber/FKM Biton | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHA00S-G0ctg -000-1MAA-2N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Chloroprene rubber/CR Neophane | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHA00S-G0ctg -000-1MAA-2Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Chloroprene rubber/CR Neophane | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHA00S-G0ctg -000-1MAA-3N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Palpul Oloerastomer/FFKM Calletz | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHA00S-G0ctg -000-1MAA-3Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Palpul Oloerastomer/FFKM Calletz | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHA00S-G0ctg -000-1MAA-4N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Multiple combinations | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHA00S-G0ctg -000-1MAA-4Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Multiple combinations | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHA00S-G0ctg -000-1MAA-5N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Special | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHA00S-G0ctg -000-1MAA-5Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Special | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1949
- 669 employees