FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof
OVAL Corporation
About This Product
It is a hydrogen -proof structure model of the FHA series for general -purpose gas flow rate. Similarly, the FHD series is a hydrogen explosion -proof structure of the control valve of the General -Lass Mass Flow Controller FHB series. By combining these, you can configure an explosion -proof gas mass flow controller.
Ideal for various gas supply systems, gasmixing processes, pilot plants, semiconductor manufacturing processes, and gas flow measurement and control in dangerous places such as research institutes.
■ Main features
・ It is a JIS explosion -proof structure “D3AG4” type that can be applied to hydrogen gas.
・ Cover the wide flow range from 5Nccm (ml/min [normal]) to 500nlm (L/min [normal)). (Up to 100nlm as a controller)
・ The optimal full scale adjustment is possible by the Reminar flow element.
・ It supports a wide range of pressure from vacuum to up to 39.2MPa.
・ It can be applied to most gas bodies other than high -corrosive caries.
・ Excellent responsiveness.
-The control valve is an electromagnetic type of the Normal Close type, so it has a good response and can be used safely.
・ You can handle a variety of applications by combining with the lead out unit.
* There are other model numbers.
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Product
FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof
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Handling Company
OVAL Corporation
10 Models of FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Body material | Body structure | Converter structure | Explosion -proof structure | Full scale flow rate | Input / output signal | Laws and regulations | Maximum use pressure | Model | Operating temperature limit | Process connection (body) | Special specifications | Sticker material | Temperature grade/ignition degree | Turndown | accuracy | connection | fluid | power supply | temperature | version |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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FHC30S-G0ctg-D40-1MAA-1N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | None (standard) | Fluorine rubber/FKM | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHC30S-G0ctg-D40-1MAA-1Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | Special | Fluorine rubber/FKM | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHC30S-G0ctg-D40-1MAA-2N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | None (standard) | Chloroprene rubber/CR | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHC30S-G0ctg-D40-1MAA-2Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | Special | Chloroprene rubber/CR | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHC30S-G0ctg-D40-1MAA-3N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | None (standard) | Palpul Oloerastomer/FFKM | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHC30S-G0ctg-D40-1MAA-3Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | Special | Palpul Oloerastomer/FFKM | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHC30S-G0ctg-D40-1MAA-4N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | None (standard) | Multiple combinations | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHC30S-G0ctg-D40-1MAA-4Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | Special | Multiple combinations | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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FHC30S-G0ctg-D40-1MAA-5N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | None (standard) | Special | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
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|
FHC30S-G0ctg-D40-1MAA-5Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | TIIS Explosion (D3AG4) | 7.5 ml/min (normal) at air | Analog signal FHC | standard | 39.2MPa | Massflow meter (explosion -proof) | -10 ~ + 50 ℃ | Passion parallel screw (standard) | Special | Special | G4 (TIIS) | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
Click on the part number for more information about each product
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About Company Handling This Product
- Japan
- Since 1949
- 669 employees