High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
OVAL Corporation
About This Product
Measures / control the gas flow accurately on a mass base. The FHA series is a high -precision and compact gas flow meter. The FHB series is a flow controller that integrates the control valve (electromagnetic type) in the FHA series. These can be composed of a simple flow rate measurement / control system by combining with a leadout unit (ROU) with a built -in indicators and configurations.
It is ideal for gas flow measurement and control used in various gas supply systems, gasmixing processes, pilot plants, semiconductor manufacturing processes, and research institutes.
■ Main features
・ Cover the wide flow range from 5Nccm (ml/min [normal]) to 500nlm (L/min [normal)).
・ The optimal full scale adjustment is possible by the Reminar flow element.
・ It can be applied to most gas bodies other than high -corrosive caries.
・ Excellent responsiveness.
-The control valve used in the mass flow controller is a Normarclose type electromagnetic type, so it has a good response and can be used safely.
・ You can handle a variety of applications by combining with the lead out unit.
* There are other model numbers.
-
Product
High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
-
Handling Company
OVAL Corporation
-
Categories
10 Models of High-precision and compact gas thermal mass flow meter / controller MASFLO-OVALⅡ Non-explosion prevention
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Body material | Body structure | Converter structure | Explosion -proof structure | Full scale flow rate | Input / output signal | Laws and regulations | Maximum use pressure | Model | Operating temperature limit | Process connection (body) | Special specifications | Sticker material | Temperature grade/ignition degree | Turndown | accuracy | connection | fluid | power supply | temperature | version |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
|
|
FHA00S-G0ctg -000-1MAA-1N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Fluorine rubber/FKM Biton | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-1Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Fluorine rubber/FKM Biton | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-2N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Chloroprene rubber/CR Neophane | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-2Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Chloroprene rubber/CR Neophane | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-3N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Palpul Oloerastomer/FFKM Calletz | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-3Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Palpul Oloerastomer/FFKM Calletz | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-4N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Multiple combinations | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-4Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Multiple combinations | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-5N |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | None (standard) | Special | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
|
|
FHA00S-G0ctg -000-1MAA-5Z |
Available upon quote | SUS316 | The standard joint welding is "special" | Integrated form | Non -explosion protection | 7.5 ml/min (normal) at air | Analog signal | standard | 0.99MPa | Massflow meter (non -explosion proof) | -10 ~ + 70 ° C | Passion parallel screw (standard) | Special | Special | Non -explosion protection | 1:50 | Full -scale ± 1 % (in real gas calibration) | Kuikuinjin, metal gasket surface sticker, etc. | gas | ± 15VDC power supply | standard | Version A |
Click on the part number for more information about each product
Customers who viewed this product also viewed
Other products of OVAL Corporation
View more products of OVAL Corporation
About Company Handling This Product
- Japan