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  3. Ellipsometers
  4. Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device) (Fiblab Co., Ltd.)
Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Mary-102ST
Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Fiblab Co., Ltd.

Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)
Fiblab Co., Ltd.

About This Product

■ type

Manual, automatic, multi -entry / back side removal function

■ Device overview

An erypsometer is a device that measures the change in the polarized state of light reflection light on the material surface and analyzes the thickness of the thin film, the optical constant such as the refractive index and the absorption coefficient, or the optical constant of the bulk material. Measurements can be performed by non -contact or non -destruction.

■ Characteristics

Mary-102 was developed in pursuit of small, low price, high accuracy, and ease of use, based on our optical measurement technology. In addition to research software that enhances simulation functions, etc., you can also select industrial software suitable for routine work. Since the rotating phase phase method is adopted in the measurement method, the delta area, which is difficult to measure by the rotation inspection optical method, can be measured high accurately without putting in and out of the phase plate, and the zone judgment is performed quickly.

■ Automatic multi-point measurement is possible on the manual θ-Y stage. Mapping measurement is also possible, and the result is also displayed in a 3D bird's eye view.

・ Automatic θ -axis stroke: 360 degree decomposition ability: 0.1 degrees ・ Automatic Y -axis stroke: 120mm resolution ability: 0.1mm " There are other part numbers.

  • Product

    Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)

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10 Models of Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)

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Image Part Number Price (excluding tax)
Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102ST

Mary-102ST

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102SH

Mary-102SH

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102SM

Mary-102SM

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102FT

Mary-102FT

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102FH

Mary-102FH

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102FM

Mary-102FM

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102MT

Mary-102MT

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102MH

Mary-102MH

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102mm

Mary-102mm

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Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)-Part Number-Mary-102MCC

Mary-102MCC

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Fiblab Co., Ltd.

  • Japan

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