Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)
Fiblab Co., Ltd.
About This Product
■ type
Manual, automatic, multi -entry / back side removal function
■ Device overview
An erypsometer is a device that measures the change in the polarized state of light reflection light on the material surface and analyzes the thickness of the thin film, the optical constant such as the refractive index and the absorption coefficient, or the optical constant of the bulk material. Measurements can be performed by non -contact or non -destruction.
■ Characteristics
Mary-102 was developed in pursuit of small, low price, high accuracy, and ease of use, based on our optical measurement technology. In addition to research software that enhances simulation functions, etc., you can also select industrial software suitable for routine work. Since the rotating phase phase method is adopted in the measurement method, the delta area, which is difficult to measure by the rotation inspection optical method, can be measured high accurately without putting in and out of the phase plate, and the zone judgment is performed quickly.
■ Automatic multi-point measurement is possible on the manual θ-Y stage. Mapping measurement is also possible, and the result is also displayed in a 3D bird's eye view.
・ Automatic θ -axis stroke: 360 degree decomposition ability: 0.1 degrees
・ Automatic Y -axis stroke: 120mm resolution ability: 0.1mm "
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Product
Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)
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Handling Company
Fiblab Co., Ltd.
10 Models of Measured by non -contact / non -destruction laser elypsometer (automatic elliptical polarized analysis device)
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About Company Handling This Product
- Japan
- Since 1988
- 10 employees