High -precision measurement achievement of spectroscopy erypsometer large base support
Fiblab Co., Ltd.
About This Product
■ type
Multiple incidence, short wavelength, long wavelength
■ High precision measurement II
The rotating phase phase method is adopted in the measurement method, and high -precision measurement is realized in any area, regardless of the value of the measured value δ (phase difference).
■ High precision measurement Ⅱ
The phase plate uses a dedicated phase plate.
■ Wavelength resolution ability
The monochrome meter uses a multi -channel compatible with a 2D CCD of 1,024 divisions, so you can perform a high -wave resolution of 0.75 nm in a short time.
■ Analysis power
Our analysis software was developed with emphasis on usability to smoothly analyze complicated lighting erypo. However, the high -analysis power such as EMA analysis and EMF analysis is maintained as it is. In addition, it is equipped with a spectral analysis software "Scout" that covers our analysis software, such as the introduction of a unique wavelength distributed type and analysis of anisotropy.
■ Reproduction
High re -measurement is achieved by combining the optical encoder and the hall motor.
■ Reliability
At the time of calibration, in addition to SIO2/SI samples of several types of SIO2/SI of NIST standards, two types of glass substrates are measured to increase the reliability of data.
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Product
High -precision measurement achievement of spectroscopy erypsometer large base support
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Handling Company
Fiblab Co., Ltd.
9 Models of High -precision measurement achievement of spectroscopy erypsometer large base support
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About Company Handling This Product
- Japan
- Since 1988
- 10 employees