This product is registered by Nippon Sokki Co., Ltd..
About This Product
■HAF series - high flow
Compensated ±50 SCCM to ±750 SCCM - Analog or Digital Output 10 SLPM to 300 SLPM - Digital Output
■Product overview
Honeywell Zephyr™ HAF Series Sensors provide a digital interface for sensing airflow within a defined full-scale flow rate and compensated temperature range. The sensor's thermally isolated heater and temperature sensing element allow it to respond quickly to air or gas flows.
Zephyr sensors are designed for mass flow measurements of air and non-corrosive gases.
■10 SLPM~300 SLPM
Standard flow ranges are 10SLPM, 15SLPM, 20SLPM, 50SLPM, 100SLPM, 200SLPM, and 300SLPM, with custom flow ranges available. The sensor is fully calibrated and temperature compensated using an on-board application specific integrated circuit (ASIC).
The HAF series is calibrated over the entire temperature range of 0 °C to 50 °C [32 °F to 122 °F]. State-of-the-art ASIC-based compensation provides digital (I2C) output with 1ms response time.
■±50 SCCM~±750 SCCM
Standard flow ranges include ±50, ±100, ±200, ±400, and ±750 SCCM. Custom flow ranges are also available. The sensor is fully calibrated and temperature compensated using an on-board application specific integrated circuit (ASIC).
The HAF series has a compensated temperature range of 0°C to 50°C [32°F to 122°F] and an operating temperature range of -20°C to 70°C [-4°F to 158°F]. State-of-the-art ASIC-based compensation provides digital (I2C) output with 1ms response time.
These sensors utilize heat conduction principles to measure mass flow. The sensor consists of a microelectronic and MEMS (micro-electro-mechanical system) microbridge with a temperature-sensing resistor deposited with thin films of platinum and silicon nitride. The MEMS sensing die is installed in precise and carefully designed flow channels to provide repeatable response to flow.
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