Flow sensor AWM40000 series
Nippon Sokki Co., Ltd.
About This Product
■AWM40000 series
Compensated or uncompensated ±25.0SCCM, 1.0SLPM, 6.0SLPM analog output
Product overview
■Operation
Microbridge mass airflow sensors operate using the principle of thermal conduction. Mass airflow flows over the surface of the sensing element. The output voltage varies proportionally to the mass of air or flow rate of other gases through the intake and exhaust ports of the package. A specially designed housing precisely directs and controls airflow through microstructured sensing elements. The mechanical design of the package allows easy attachment to printed circuit boards.
Microbridge mass airflow sensors feature a unique silicon chip based on advanced microstructure technology. It consists of a thermally insulated bridge structure containing a thin film, heater and temperature sensing element. The bridge structure allows sensitive and rapid detection of air or other gases flowing over the chip. Dual sensing elements located on either side of the central heating element indicate flow direction and flow rate. Laser-trimmed thick-film and thin-film resistors ensure consistent compatibility between devices.
Microbridge mass airflow sensors use temperature sensing resistors deposited with a thin film of silicon nitride. This temperature-sensing resistor is suspended in a two-bridge configuration over an etched cavity in the silicon. The chip is installed in precisely positioned airflow channels and provides a repeatable response to flow rate. The etching of the cavity space at the bottom of the flow sensor bridge provides highly effective thermal isolation of the heater and sense resistor. The miniaturization and thermal isolation of the Microbridge mass air flow sensor allows for very fast response to flow and high sensitivity.
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Product
Flow sensor AWM40000 series
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Handling Company
Nippon Sokki Co., Ltd.
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Categories
1 Models of Flow sensor AWM40000 series
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
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AWM42150VH |
Available upon quote |
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About Company Handling This Product
- Japan