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  3. X-Ray Diffractometers
  4. Enhanced X'pert Platform X'pert³ Series X'pert³ MRD XL (Spectory)

Enhanced X'pert Platform X'pert³ Series X'pert³ MRD XL
Spectory

About This Product

■ Thin film single crystal analysis X -ray diffraction device

MalverN Panalytical's thin film single crystal analysis X -ray diffraction device (MRD), which boasts a long history and high praise, is also adopted by the X'pert³ MRD XL generation. The improved performance and reliability of the new platform will enhance the analysis and functions of the X -ray scattering method and support the following fields. ・ Find -end material physical properties ・ Research and industrial thin film technology ・ Evaluation of measurement characteristics in semiconductor process development The X'pert³ MRD XL deals with a wide range of wafers up to 200mm.

■ Functional

・ X'pert³ Extended MRD (XL) X'pert³ Extended Mrd (XL) has high versatility within the X'pert³ Mrd system. The additional Prefix mounting platform allows the X -ray mirror and high -resolution monological light device to be installed online, greatly enhancing the scattering intensity of the incident light. Various applications can be obtained by various applications without reducing data quality, and high scattering strength high -solution X -ray laser circulation reduces measurement time such as reverse space mapping measurement, and can be reconstructed from standard settings to extension settings in a few minutes by the prefix concept. With the second generation Prefix, you can easily reset and determine the position of the optical device more accurately. ・ X'pert³ Mrd (XL) IN-PLANE By incorporating the X'pert³ MRD (XL) system into the In-Plane diffraction, you can measure the diffraction from the parallel lattice surface to the sample surface. In addition, since one system can analyze the standard arrangement and IN-Plane placement, various diffraction measurements can be performed with multiple crystal thin films and single crystal thin films. These are only part of the numerous advantages. 

■ Specifications

・ Flexibility of excellent systems that meet future needs The X'PERT³ MRD system provides advanced and innovative X -ray fold solutions, from research to process development and process management. With the technology used, all the system fields can be upgraded to support all existing options and new functions of future hardware and software.

  • Product

    Enhanced X'pert Platform X'pert³ Series X'pert³ MRD XL

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