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  2. Measuring Equipment
  3. Interferometers
  4. High accuracy for distance and thickness measurement Interferometer (Micro-Epsilon JAPAN K.K.)
High accuracy for distance and thickness measurement Interferometer-Interferometer 5400-DS
High accuracy for distance and thickness measurement Interferometer-Interferometer 5400-TH
High accuracy for distance and thickness measurement Interferometer-Interferometer 5600-DS
High accuracy for distance and thickness measurement Interferometer-Interferometer 5420
High accuracy for distance and thickness measurement Interferometer-Micro-Epsilon JAPAN K.K.

High accuracy for distance and thickness measurement Interferometer
Micro-Epsilon JAPAN K.K.

Micro-Epsilon JAPAN K.K.'s Response Status

Response Rate

100.0%

Response Time

190.9hours

About This Product

Micro Epcilon's innovative white light -colored meter has a benchmark in high -precision distance and thickness measurement. It provides a stable measurement result by resolution of the subnanometer, providing a relatively wide measurement range and a long offset distance.

■ Characteristics

･ Absolute distance and multi -peak distance measurement ･ Measurement of thickness and multiple thickness measurements that do not depend on the distance ･ Class's highest <30 picometer resolution and outstanding linear ･ High signal stability due to new evaluation algorithm and active temperature correction ･ Easy parameters via web interface ･ Numerous interfaces that can also connect to buses

■ We have three interferometer for three models

･ IMS5400-DS for high-precision industrial distance measurement ･ IMS5400-TH for accurate thickness measurement ･ IMS5600-DS suitable for vacuum environments corresponding to the distance measurement of picometer resolution

  • Product

    High accuracy for distance and thickness measurement Interferometer

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4 Models of High accuracy for distance and thickness measurement Interferometer

Click on the part number for more information about each product

Image Part Number Price (excluding tax) Measurement range Linearness resolution Measurement rate
High accuracy for distance and thickness measurement Interferometer-Part Number-Interferometer 5400-DS

Interferometer 5400-DS

Available upon quote

2.1 mm

<± 50 nm

<1 nm

Up to 6 kHz

High accuracy for distance and thickness measurement Interferometer-Part Number-Interferometer 5400-TH

Interferometer 5400-TH

Available upon quote

45 mm ± 3.5 mm
70 mm ± 2.1 mm

<± 100 nm

<1 nm

Up to 6 kHz

High accuracy for distance and thickness measurement Interferometer-Part Number-Interferometer 5600-DS

Interferometer 5600-DS

Available upon quote

2.1 mm

<± 10 nm

<30 PM

Up to 6 kHz

High accuracy for distance and thickness measurement Interferometer-Part Number-Interferometer 5420

Interferometer 5420

Available upon quote -

20 µm

Up to 1 nm

-

Click on the part number for more information about each product

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About Company Handling This Product

Micro-Epsilon JAPAN K.K.

Response Rate

100.0%

Response Time

190.9hrs

Related search keywords

Interferometers
Interferometers　Micro-Epsilon JAPAN K.K.
Micro-Epsilon JAPAN K.K.

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