High accuracy for distance and thickness measurement Interferometer
Micro-Epsilon JAPAN K.K.
About This Product
Micro Epcilon's innovative white light -colored meter has a benchmark in high -precision distance and thickness measurement. It provides a stable measurement result by resolution of the subnanometer, providing a relatively wide measurement range and a long offset distance.
■ Characteristics
･ Absolute distance and multi -peak distance measurement
･ Measurement of thickness and multiple thickness measurements that do not depend on the distance
･ Class's highest <30 picometer resolution and outstanding linear
･ High signal stability due to new evaluation algorithm and active temperature correction
･ Easy parameters via web interface
･ Numerous interfaces that can also connect to buses
■ We have three interferometer for three models
･ IMS5400-DS for high-precision industrial distance measurement
･ IMS5400-TH for accurate thickness measurement
･ IMS5600-DS suitable for vacuum environments corresponding to the distance measurement of picometer resolution
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Product
High accuracy for distance and thickness measurement Interferometer
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Handling Company
Micro-Epsilon JAPAN K.K.
4 Models of High accuracy for distance and thickness measurement Interferometer
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Linearness | Measurement range | Measurement rate | resolution |
|---|---|---|---|---|---|---|
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Interferometer 5400-DS |
Available upon quote | <± 50 nm | 2.1 mm | Up to 6 kHz | <1 nm |
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Interferometer 5400-TH |
Available upon quote | <± 100 nm |
45 mm ± 3.5 mm 70 mm ± 2.1 mm |
Up to 6 kHz | <1 nm |
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Interferometer 5600-DS |
Available upon quote | <± 10 nm | 2.1 mm | Up to 6 kHz | <30 PM |
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Interferometer 5420 |
Available upon quote | 20 µm | - | - | Up to 1 nm |
Click on the part number for more information about each product
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