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  5. Interferometer 5420


High accuracy for distance and thickness measurement Interferometer-Micro-Epsilon JAPAN K.K.

Interferometer 5420 | High accuracy for distance and thickness measurement Interferometer
Micro-Epsilon JAPAN K.K.

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Model Description

White light interference meter corresponding to high -precision thickness measurement of wafer

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  • Part Number

    Interferometer 5420



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High accuracy for distance and thickness measurement Interferometer Interferometer 5420's performance table

Items marked with have different values ​​depending on the model number.

Product Image Price (excluding tax) Linearness resolution
High accuracy for distance and thickness measurement Interferometer-Part Number-Interferometer 5420 Available upon quote 20 µm Up to 1 nm

There are 4 models for this product.

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About Company Handling This Product

Micro-Epsilon JAPAN K.K.

Category of this product

Interferometers

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