Product
Attotive pressure (remote) dielectric barrier discharge device Slit type SKIP-SLITHandling Company
SAKIGAKE-SemiconductorProduct Image | Part Number | Price (excluding tax) | Gas flow control mechanism | Gas flow rate | Process pressure | Recommended gas | Slit size | power supply |
---|---|---|---|---|---|---|---|---|
Skip-Slit |
Available upon quote | Ukiko type ORMFC | Up to 100L/min | Atmospheric pressure |
Argon * Discharge will be discharged even with other gas. |
~ 100mm | AC100V/50/60Hz |