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Ar gas for sputtering
Auxiliary pump
Board size
Compressed air
Cooling water pressure
Cooling water running water
Cooling water temperature
Earth
Film thickness distribution
Forming film
Gas introduction system
Heater
High frequency power supply
Installation area
Interelectrode distance
Main pump
Manufacturer
N2 gas for chamber leak
N2 gas for pump leak
Number of boards installed
Number of revolutions
Option
Power supply
Pump exhaust allowable exhaust port pressure
Sputter method
Target holder
Ultimate pressure
Weight
Ultimate pressure Load lock chamber
Ultimate pressure Sputtering chamber
Part Number
HSR-351L (with load lock)Handling Company
Sanko Ematech Co., Ltd.Categories
| Image | Price (excluding tax) | Ar gas for sputtering | Auxiliary pump | Board size | Compressed air | Cooling water pressure | Cooling water running water | Cooling water temperature | Earth | Film thickness distribution | Forming film | Gas introduction system | Heater | High frequency power supply | Installation area | Interelectrode distance | Main pump | Manufacturer | N2 gas for chamber leak | N2 gas for pump leak | Number of boards installed | Number of revolutions | Option | Power supply | Pump exhaust allowable exhaust port pressure | Sputter method | Target holder | Ultimate pressure Load lock chamber | Ultimate pressure Sputtering chamber | Weight |
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Available upon quote | 0.1~0.2MPa・G | Oil rotary vacuum pump (RP) | When rotating ⇒ Φ150mm, when stationary ⇒ Φ50mm | 0.4~0.5MPa・G | 0.2~0.3MPa・G | 6L/min | 5~25℃ | A type | When rotating ⇒ Φ100mm area ±5%, when stationary ⇒ Φ40mm area ±10% | Metals, insulators, etc. | Ar-mass flow controller (MFC) 1 system | MAX300℃ (substrate surface) | 13.6MHz 200W | W2,800mm×D1,100mm×H1,650mm | 70~110mm | Oil diffusion vacuum pump (DP) | Shimadzu Industrial Equipment Systems Co., Ltd. | 0.1~0.2MPa・G (air is also possible) | 0.02MPa・G (air is also possible) | 1 piece | MAX20rpm | Oil mist trap, liquid nitrogen trap, reverse sputtering mechanism | AC200V, 3Φ, 60Hz, 5KVA | 20kPa・G or less | Depot up | 2 inch 3 units | 6.7Pa | 10-4Pa level | 500Kg |
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