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Kyodo International, Inc.'s Power Monitoring Systems

Kyodo International, Inc.

1 product found

Kyodo International, Inc.

Slurry motor (pump) current/flow monitoring system

80+ people viewing

Last viewed: 1 day ago

Standard Response

Response Rate
100.0 %
Response Time
30.6 hours

It visualizes and digitizes the slurry motor (pump) current and slurry flow rate values ​​for semiconductor CMP equipment, and generates an alarm i...


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