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This section provides an overview for lithographers as well as their applications and principles. Also, please take a look at the list of 12 lithographer manufacturers and their company rankings. Here are the top-ranked lithographer companies as of December, 2024: 1.Veeco Instruments, Inc., 2.Onto Innovation Inc., 3.TSI.
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Department of Chemistry, Graduate School of Science, Tohoku University (Master of Science)
As a display engineer, engaged in Seiko Epson Corporation, Sony Corporation, Japan Display Corporation, etc.
https://researchmap.jp/tanakachihiro
https://www.linkedin.com/in/chihiro-tanaka/
Lithographers are used in the manufacture of semiconductors, liquid crystal displays, and other products to depict patterns of circuits and pixels on substrates by irradiating light.
Because they use extremely intense light and require precise control of the stage, they are often large and cost in the hundreds of millions of dollars. Lithographers are very important in the manufacturing of semiconductors and LCDs because they determine the patterns of design data (CAD data). Various lithographer methods have been developed and adopted by various companies.
Lithographers are mainly used in semiconductor manufacturing and flat panel display (FPD) manufacturing, including liquid crystal displays (LCDs).
In the semiconductor manufacturing process, a silicon wafer is used as a substrate, and after forming an oxide film, etc., a photoresist (photosensitive material) is coated, and the coated surface is irradiated with intense ultraviolet light emitted from Lithographer through a photomask so that unwanted areas can be removed by etching, etc. Such a method using a lithographer is called photolithography.
In the LCD manufacturing process, a glass substrate is used, and several cycles of deposition, photolithography, and etching of thin films of metals and other materials are repeated.
On one substrate, pixel electrodes and switching elements (TFT elements, etc.) can be formed, and on the other substrate, color filters with the three primary colors of light (red, green, and blue) can be formed. By laminating both substrates and placing liquid crystal material between them, a panel for liquid crystal display is completed.
When selecting lithographers, it is necessary to fully discuss with the equipment manufacturer the type of light to be used in the exposure, the accuracy, and the precision of the stage before purchasing the equipment, as they are extremely expensive.
Exposure measures consist of a light source, deflection lens, photomask, focusing lens, stage, and a robot for transporting silicon wafers and other materials.
The lenses and photomasks are designed with extremely high precision, and the stage also operates with high precision. During operation, the exposure target is precisely fixed to the stage. During operation, the stage moves with each exposure, so that numerous patterns are depicted on the exposed object over the entire exposure area.
The intense light with a short wavelength emitted from the light source is directed by a deflecting lens and irradiated onto a photomask, which is the prototype for the circuit pattern. The light passing through the photomask is focused by a condenser lens to produce a very small circuit pattern on the exposed object.
Once the exposure is completed over the entire exposed area, the photomask is transported by a robot or other means. Some products are designed so that the exposure target is permeated by a liquid, allowing for more precise exposure.
Lithographer manufacturing vendors for semiconductors are almost oligopolized by European and Japanese manufacturers, with Europe (84%) and Japan (14%) in 2018. In addition, the market for flat panel display (FPD) lithographers for liquid crystal displays (LCDs) is almost exclusively dominated by two Japanese manufacturers.
Lithographers for semiconductors are said to be the most precise machines in history, and the latest semiconductors have been miniaturized to the extent that the width of wiring on chips (process rule) is 3 to 5 nm.
The latest FPD lithographers have line widths of less than a few microns, and these are becoming thinner and larger year by year, and the equipment is becoming more precise and larger to achieve more beautiful, high-definition images.
Among semiconductor lithographers, EUV (extreme ultraviolet) lithographers are those that use extremely short wavelengths of light known as extreme ultraviolet (EUV).
Lithographers using ArF excimer lasers, which have been used in the past, are able to process finer dimensions that are difficult to process. Semiconductor miniaturization has been progressing in accordance with Moore's Law (semiconductor integrated circuits become four times more highly integrated and functional in three years).
The development of reduced projection exposure technology called steppers, shorter exposure wavelengths, and immersion exposure technology has dramatically improved resolution. Miniaturization means that the minimum process size that can be burned onto a wafer becomes smaller, and the minimum process size R is expressed by the following Rayleigh's equation.
R = k/λ/NA *k is a proportionality constant, λ is the exposure wavelength, and N.A. is the numerical aperture of the exposure optical system.
Lithographers have been able to achieve miniaturization by reducing k, λ, and NA through the development of various technologies, and EUV lithographers are considered to be a technology that can break through the limitations of the past by shortening the exposure wavelength, and have been mass-produced in recent years.
FPDs (flat panel displays) include liquid crystal displays, plasma displays, and organic electroluminescent (EL) displays, which can be seen in smartphones, tablet-type terminals, and flat-screen TVs for home use, as well as in every aspect of our homes and towns.
FPD lithographers are used to manufacture flat panel displays. In principle, they are the same as semiconductor manufacturing equipment, which irradiates light onto a photomask and exposes a circuit pattern on a glass plate through a lens to create an array.
In addition, color filters that produce images and video for displays are created and combined with the arrays to complete the display. Color filters are used to express the colors of images and video, and pigment-based color resist is applied to the glass, which is then exposed and developed.
*Including some distributors, etc.
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Veeco Instruments Inc., founded in 1945, is a supplier headquartered in Plainview, New York, specializing in technology solutions for semiconductor manufacturers and scientific markets. Veeco offers a range of processing systems, including laser spike annealing technology, the AP200/300 series of lithography systems designed on the customizable Unity Platform™, ion beam systems for etch and deposition performance, as well as metal organic chemical vapor deposition (MOCVD) systems for thin film deposition. Veeco acquired Epiluvac AB, a Swedish manufacturer of chemical vapor deposition (CVD) systems, to perform advanced silicon carbide (SiC) applications, particularly in the electric vehicle manufacturing industry.
TSI, headquartered in the United States, is a supplier of instruments and measurements solutions since 1961. The company provides measurement, application guidance, and data analytics solutions that enables customers to make informed decisions in pharmaceutical manufacturing, semiconductor and electronics manufacturing, or cleanroom certification. Their instruments have helped organizations and individuals measure materials, analyze data, and comply with requirements of every kind.They also have product development, manufacturing and customer support facilities on three continents with distributors and manufacturers’ representatives providing local support worldwide.
Onto Innovation Inc., established in 2019 and based in Massachusetts, USA, is a developer and supplier of software solutions designed to digitize semiconductor manufacturing operations. The company specializes in metrology, defect inspection, lithography, and smart manufacturing software solutions to accelerate product and process development. Some of its product offerings are the AutoShell software, ControlWORKS software, Dragonfly G3 System, Atlas Series, QS2200/Stratus System, and JetStep G35 System. It is certified to ISO 9001:2015 and ISO 27001:2013 Information Security standards, catering to the semiconductor sector worldwide.
Sono-Tek Corporation was established in 1975 and is headquartered in Milton, New York. The company specializes in precision ultrasonic coating solutions, serving diverse industries, including electronics, medical, and industrial. Its product range encompasses ultrasonic spray nozzles, coating systems, and fluxers. Sono-Tek's pioneering technology is evident through multiple patents and global market recognition such as the acquisition of ISO 9001: 2015. The company is also found in many other countries, with seven application labs and over 50 factory-trained distributors to add to its design and manufacturing headquarters in the US.
JEOL Ltd. is a Japanese developer and manufacturer of scientific and industrial equipment originally established in 1949 as Japan Electron Optics Laboratory Co., Ltd. before its rebrand to JEOL Ltd. in 1961. Based in Akishima, Tokyo, the company produces various spectrometers, electron microscopes, electron beam lithography systems (EBLs), and thin-film formation equipment (TFFE). They also manufacture equipment for clinical testing or analysis, such as clinical chemistry analyzers and rack handlers. JEOL has operations and subsidiaries in three continents, including JEOL (Europe) B.V., JEOL USA Inc. and JEOL (UK) Ltd.
Nanoscribe, a medium-sized company, develops and produces 3D printers and grayscale lithography systems as well as specially developed printing materials and application-specific solutions for various microfabrication applications. The specialist for additive manufacturing of high-precision structures and objects on the nano-, micro- and mesoscale was founded in 2007 as a spin-off of the Karlsruhe Institute of Technology (KIT) and is part of the BICO Group since June 2021. More than 4,000 users and operators at top universities and innovative companies worldwide benefit from the groundbreaking technology and application tailored solutions for 3D Microfabrication. Nanoscribe has created its strong market leading position through high quality engineering and agility to continuously develop its products to meet customers’ high expectations.
Kulicke and Soffa Industries, Inc., founded in Philadelphia, Pennsylvania, in 1951 is a manufacturer of semiconductor and electronics assembly solutions. The company's product portfolio includes advanced Packaging (Hybrid), Ball Bonders, Die Attaches, Electronics Assemblies and Wafer Level Bonders. Their products are used in markets such as automotive, communications, computer, consumer, and data storage. The company provides services such as Product Selection Guidance, Engineering Support, New Product Design and Development and Custom Manufacturing.
NIKON CORPORATION was founded in Japan in 1917 and is a global manufacturer of imaging products, optics, precision equipment, and instruments. The company's main product offerings include the Nikon Z series of mirrorless cameras, digital SLR cameras, and COOLPIX. It also offers consumer and professional accessories such as NIKKOR brand optics, Speedlights, system accessories, and software products, along with premium sports and recreational optical products, including full-line binoculars, Fieldscopes, and rangefinders. The company complies with international standards such as ISO 14001:2015 and ISO 45001:2018, catering to industries such as photography and videography, healthcare, manufacturing, and research.
Independent Can Company, founded in 1929 in USA, is manufacturer of specialty metal packaging and metal lithography. The company stands as a pioneer in state-of-the-art metal decorating, boasting two cutting-edge printing facilities and offering a range of products, including Custom Tins, Decorative Tins, Seamless Tins, and Hermetic Cans.Its growth has been achieved through internal development and strategic acquisitions, allowing for the introduction of various capabilities and products. The company collaborates with clients to understand its brand identity, offering custom tin and can options. Its expertise lies in crafting metal packaging that appeals to customers while minimizing environmental impact.
Kyodo International, Inc. established in 1970 and based in Kawasaki-shi, Japan, is a manufacturer and distributor of microfabrication tools and equipment. The company's product range includes deposition tools, photolithography equipment, etching machines, CMP processing units, and nanoimprinting tools. These products are used for the development and manufacturing of electronic components and systems. The company serves industries such as electronics manufacturing, microelectromechanical systems (MEMS) production, and life sciences, it ensures the delivery of high-precision tools for intricate manufacturing processes. Its services span the sale, repair, and overhaul of consumable parts.
EV Group (EVG), established in 1980 in Austria, is a supplier of high-volume production equipment and process solutions for semiconductor, MEMS, compound semiconductor, power device, and nanotechnology device manufacturing. Its product range includes lithography systems, bonding systems, nanoimprint lithography (NIL) equipment, metrology systems, and photoresist coaters, vital in semiconductor manufacturing. The company have earned numerous accolades, including the 3D InCites Award, 2023 ISES Equipment Manufacturer of the Year Award, and known as one of the suppliers of fab equipment to foundation chip makers, emphasizing its excellence in the industry.
Ranking as of December 2024
Derivation Method| Rank | Company | Click Share |
|---|---|---|
| 1 | Veeco Instruments, Inc. |
24.0%
|
| 2 | Onto Innovation Inc. |
12.4%
|
| 3 | TSI |
12.4%
|
| 4 | Nanoscribe GmbH & Co. KG |
9.3%
|
| 5 | Independent Can Co. |
8.5%
|
| 6 | Kulicke and Soffa Industries, Inc. |
7.8%
|
| 7 | Sono-Tek Corporation |
6.2%
|
| 8 | JEOL Ltd. |
6.2%
|
| 9 | EV Group |
5.4%
|
| 10 | Nikon Corporation |
3.9%
|
Derivation Method
The ranking is calculated based on the click share within the lithographer page as of December 2024. Click share is defined as the total number of clicks for all companies during the period divided by the number of clicks for each company.Number of Employees
Newly Established Company
Company with a History
*Including some distributors, etc.
*Including some distributors, etc.
| Country | Number of Companies | Share (%) |
|---|---|---|
|
United States of America
|
4 | 36.4% |
|
Japan
|
4 | 36.4% |
|
Germany
|
1 | 9.1% |
|
Taiwan
|
1 | 9.1% |
|
Austria
|
1 | 9.1% |
33 products found
33 products
Neoark Co., Ltd.
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■Making photolithography more accessible Semiconductors were once called the "rice of industry". The technology that underpins the semiconductor pr...
Neoark Co., Ltd.
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Cosmo Giken Co., Ltd.
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UV irradiation device "TTUV011" equipped with a rotating mechanism as standard equipment. 3D printer additional exposure, painting and coating curi...
Adtech Engineering Co., Ltd.
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■Product overview It is widely used not only for printed circuit boards, but also for manufacturing substrate core boards and build-up boards, whic...
Neoark Co., Ltd.
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■Making photolithography more accessible Semiconductors were once called the "rice of industry". The technology that underpins the semiconductor pr...
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■Product overview We propose a roll to roll direct writing exposure system that pursues high-speed exposure and high resolution performance require...
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■Non-Glass capacitive sensor manufacturing process characteristics ・Microfabrication technology applying photolithography technology is essential ...
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■Product overview Our contact exposure equipment is based on the concept of high productivity and high precision alignment. We will suggest the mos...
Adtech Engineering Co., Ltd.
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PMT Co., Ltd.
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The maskless exposure system D-Light DL-1000 is a device that draws patterns on semiconductor wafers etc. using exposure. High-speed time modulatio...
Union Optical Co., Ltd.
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Fast Response
■Summary This product is a space-saving mask aligner that is easy to handle, has high performance, and is low-priced, making it ideal for use in un...
Uenoyama Kikou Co., Ltd.
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Standard Response
■Exposure machine using LED light ・By using an LED light strip, we achieve "high-speed, uniform, and high-resolution" exposure. ・LED lights opera...
3 models listed
Links International Co., Ltd.
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Standard Response
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5.0 Company Review
High positional accuracy patterning on both top and bottom sides
Kyodo International, Inc.
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Kyodo International, Inc.
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Izumiya Machinery Co., Ltd.
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PCB (print circuit board) manufacturing exposure (with baking) device in a clean room. In the nanotechnology era, clean rooms require more precise,...
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Model 6020 is a mask alignment exposure system suitable for large formats. Meets processing demands for flat panel displays and other large substra...
Kyodo International, Inc.
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The Model 2000 is a fully automatic type device that can perform flood exposure or edge bead exposure. Shadow mask technology facilitates manufactu...
Kyodo International, Inc.
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The PhableR100 is a special device that uses the Talbot effect to expose periodic structures at a fine, single-shot exposure with a half pitch of 1...
Tsubosaka Electric Co., Ltd.
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■Features ・Exposure and printing equipment that guarantees parallelism ・Equipped with a 2kW ultra-high pressure mercury lamp ・Controlled by dedi...
Tsubosaka Electric Co., Ltd.
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Physics Technology Co., Ltd.
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Kyodo International, Inc.
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The Model 200 Mask Aligner is a tabletop device that is an affordable and simple system suitable for R&D and universities. ■Mask aligner A mask al...
Kyodo International, Inc.
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A bench-top type R&D mask aligner suitable for medium-sized substrates up to 12”. ■Mask aligner A mask aligner is a device that uses ultraviolet l...
