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  4. Coating/developing device SPR series (TAZMO CO.,LTD.)
Coating/developing device SPR series-SPR3000
Coating/developing device SPR series-TAZMO CO.,LTD.

Coating/developing device SPR series
TAZMO CO.,LTD.

About This Product

The SPR3000 series is Tatsumo's flagship coater/developer specifically designed for high-speed processing. The equipment configuration is flexible and expandable, using a cluster system that allows you to select and configure as many units as you need, and is also equipped with overbake and tact management functions.

■Product features

·platform The SPR3000 series is a fully automatic processing device that can process 200mm to 300mm wafers from cassette to cassette. Furthermore, the design allows for flexible layout of process units, allowing for flexible adaptation to customer processes and space. ・Process unit coater For coating processes, we can handle everything from general-purpose coater configurations that combine a spin coating section/bake plate section to special coater configurations that combine a rotating cup section/spinless coating section, etc., and can handle film thicknesses from several μm to 100 μm. Formation is possible. developer For the development process, we have prepared a high-speed development unit. Processes long-term development of thick film resist at high speed. (1/2~1/3) Equipped with overbake mechanism, up to 16 units can be installed cool plate Compatible with high viscosity coating Supports thick film coating Can be equipped with high temperature bake (optional) ・Easy to operate Achieves excellent operability with GUI screen. You can easily edit complex recipes.

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    Coating/developing device SPR series

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1 Models of Coating/developing device SPR series

Image Part Number Price (excluding tax) High viscosity High temperature bake Applicable work Bake number Cool plate Number of cups
Coating/developing device SPR series-Part Number-SPR3000

SPR3000

Available upon quote

Pump application possible

Optional up to 450°C

200mm~300mm wafer

Up to 16 pieces (250°C) Equipped with anti-seize mechanism

Can be installed

Coating + development = up to 4 pieces

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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