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  4. Coating/developing device CSX series (TAZMO CO.,LTD.)
Coating/developing device CSX series-CSX2000
Coating/developing device CSX series-TAZMO CO.,LTD.

Coating/developing device CSX series
TAZMO CO.,LTD.

About This Product

The CSX2000 series is a coater/developer that has flexibility and expandability in its equipment configuration, and is compatible with a wide range of applications from research and development to mass production lines. In particular, we have high-performance process units for thick film processes. In configuring the equipment, we have adopted a cluster system that allows you to select and configure the required number of processing units on a unit-by-unit basis, depending on the required film formation processing content and process capacity.

■Product features

·platform The CSX2000 series is a processing device that can process 150mm to 200mm wafers from cassette to cassette and can perform fully automatic film formation/development. (Device size and layout change each time) Furthermore, the design allows for flexible layout of process units, allowing for flexible adaptation to customer processes and space. ・Process unit coater For coating processes, we can handle everything from general-purpose coater configurations that combine a spin coating section/bake plate section to special coater configurations that combine a rotating cup section/spinless coating section, etc., and can handle film thicknesses from several μm to 100 μm. Formation is possible. developer For the development process, we have prepared a high-speed development unit. Processes long-term development of thick film resist at high speed. (1/2~1/3 compared to conventional) ・Easy to operate The GUI screen provides excellent operability and allows you to easily edit complex recipes. The system configuration takes into consideration everything from research and development to mass production, further improving functionality.

  • Product

    Coating/developing device CSX series

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1 Models of Coating/developing device CSX series

Image Part Number Price (excluding tax) Power specifications Applicable work Control method
Coating/developing device CSX series-Part Number-CSX2000

CSX2000

Available upon quote

3ΦAC200V 50/60Hz

150mm~200mm wafer

Bulk control using desktop computer system

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About Company Handling This Product

TAZMO CO.,LTD.

Company Overview

TAZMO CO., LTD., founded in 1972 and based in Okayama, Japan, is a manufacturer and distributor of advanced ma...

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  • Japan

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