Dry etching equipment for mass production NE-5700/NE-7800
ULVAC Sales Co., Ltd.
About This Product
■Summary
The NE-5700/NE-7800 dry etching equipment for mass production is a scalable etching equipment that supports from one chamber to multiple chambers and emphasizes cost performance.
■Applications
・Compounds (LEDs, LDs, high frequency devices) and power devices (IGBT wiring processing, SiC processing).
・For metal wiring, interlayer insulation film (resin-based), and gate electrode processing processes.
- For etching ferroelectric materials and precious metals.
・For processing magnetic materials.
■Features
・In addition to one chamber, it can be equipped with a magnetic field ICP (ISM), NLD plasma source, ashing chamber, and CCP chamber, making it compatible with a variety of etching processes.
-Equipped with a star electrode and various temperature control functions for process reproducibility and stability.
- Easy maintenance structure with minimal downtime, comprehensive backup system including regeneration cleaning, parts provision, maintenance and training services.
・Perfect process support system provided by the Semiconductor Technology Research Institute.
-
Product
Dry etching equipment for mass production NE-5700/NE-7800
-
Handling Company
ULVAC Sales Co., Ltd.
-
Categories
1 Models of Dry etching equipment for mass production NE-5700/NE-7800
| Product Image | Part Number | Price (excluding tax) |
|---|---|---|
|
|
NE-5700/NE-7800 |
Available upon quote |
Customers who viewed this product also viewed
Other products of ULVAC Sales Co., Ltd.
View more products of ULVAC Sales Co., Ltd.
About Company Handling This Product
- Japan