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  4. Dry etching equipment for mass production NE-5700/NE-7800 (ULVAC Sales Co., Ltd.)
Dry etching equipment for mass production NE-5700/NE-7800-NE-5700/NE-7800
Dry etching equipment for mass production NE-5700/NE-7800-ULVAC Sales Co., Ltd.

Dry etching equipment for mass production NE-5700/NE-7800
ULVAC Sales Co., Ltd.

ULVAC Sales Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

125.8hours

About This Product

■Summary

The NE-5700/NE-7800 dry etching equipment for mass production is a scalable etching equipment that supports from one chamber to multiple chambers and emphasizes cost performance.

■Applications

・Compounds (LEDs, LDs, high frequency devices) and power devices (IGBT wiring processing, SiC processing). ・For metal wiring, interlayer insulation film (resin-based), and gate electrode processing processes. - For etching ferroelectric materials and precious metals. ・For processing magnetic materials.

■Features

・In addition to one chamber, it can be equipped with a magnetic field ICP (ISM), NLD plasma source, ashing chamber, and CCP chamber, making it compatible with a variety of etching processes. -Equipped with a star electrode and various temperature control functions for process reproducibility and stability. - Easy maintenance structure with minimal downtime, comprehensive backup system including regeneration cleaning, parts provision, maintenance and training services. ・Perfect process support system provided by the Semiconductor Technology Research Institute.

  • Product

    Dry etching equipment for mass production NE-5700/NE-7800

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1 Models of Dry etching equipment for mass production NE-5700/NE-7800

Image Part Number Price (excluding tax)
Dry etching equipment for mass production NE-5700/NE-7800-Part Number-NE-5700/NE-7800

NE-5700/NE-7800

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About Company Handling This Product

ULVAC Sales Co., Ltd.

Response Rate

100.0%

Response Time

125.8hrs

  • Japan

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Etching Equipment　ULVAC Sales Co., Ltd.
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