The V2000 Brightlight system is easy to use and efficient to inspect various types of defects on wafer surfaces. The system can be operated automatically or manually.
In automatic mode, inspections can be performed using recipes created on the software, and in manual mode, various processes can be performed at will. All operations, both automatic and manual, must be performed through a graphical interface.
■Features
- When a wafer cassette is placed in the device, mapping is automatically performed and the information is stored in the software.
・Dual operation mode (auto/manual) allows for both efficiency and operability.
・Wafer inspection process can be easily performed by creating recipes on software. Recipes can be created by operating the touch panel in the center of the device. This recipe can be shared by all operators.
・Creates an optimal environment for wafer inspection with a chuck that tilts and rotates on 3 axes and bright light irradiation.
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