Product
Mass flow controllerHandling Company
FCCCategories
Items marked with have different values depending on the model number.
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Product Image | Part Number | Price (excluding tax) | Accessories | ActuAtor Method | Actuator method | Bearing pressure | Bearing presure | Communication Method | Communication method | Connecting Joint | Connecting joint | Control Flow Rate Range | Control flow rate range | CorResponging Gas Species | Corresponding gas species | EXTERNAL LEAK | External leak | Flow Rate (N2 Conversion Flow Rate) | Flow Rate Accuracy | Flow Rate Output | Flow Rate Setting | Flow Setting (Not Eligible for Meters) | Flow Setting/Output Signal/Display | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate output | Flow rate setting | Flow setting (not eligible for meters) | Flow setting/output signal/display | Gas Species | Gas species | Interviewed Gas Part Material | Interviewed gas part material | Mounting Posture | Mounting posture | Necessary Differential Pressure | Necessary differential pressure | Power Supply Voltage, Current Consonations | Power Supply, Current ConsonSamption | Power supply voltage, current consumption | Power supply, current consumption | Reproducibility | Reproduction | Response Time | Response time | Sticker Material | Sticker material | Surface Treatment | Valve Type | Valve type | Warranty Temperature | Warranty temperature | accessories | surface treatment |
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C2005 |
Available upon quote | - | SOLENOID (NOT ELIGIBLE FOR METERS) | Solenoid (not eligible for meters) | 1MPa (g) | 1MPa (g) | Digital: RS485 Analog: 0-5VDC/4-20ma (Voluntary Switching) | Digital: RS485 Analog: 0-5VDC/4-20mA (voluntary switching) | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 2-100 % F.S (Not Eligible for Meters) | 2-100 % F.S (not eligible for meters) | VARIOUS GASES (PLEASE CONTACT us for color) | Various gases (please contact us for corrosion gas) | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 1 % F.S (Accuracy Guarantee Range 15-35 ° C) | Body Display: 7 Sement LED Digital: RS485 Analog: 0-5VDC/4-20ma (Voluntary Switching) | - | Body Display Setting Device/Event Input/Output Switching Digital: RS485 Analog: 0.1 to 5VDC/4.3 To 20ma (Voluntary Switching) | - | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | Body Display: 7 Sement LED Digital: RS485 Analog: 0-5VDC/4-20mA (voluntary switching) | - | Body display setting device/event input/output switching digital: RS485 analog: 0.1 to 5VDC/4.3 to 20mA (voluntary switching) | - | - | - | SUS316, PTFE, Fluorine Rubber | SUS316, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 50-300kpa | 50-300kpa | #ERROR! | - | #ERROR! | - | ± 0.2 % F.S | ± 0.2 % F.S | ≦ 2sec | ≦ 2sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | NC: Normal Close (Not Eligible for Meters) | NC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
C2020 |
Available upon quote | - | SOLENOID (NOT ELIGIBLE FOR METERS) | Solenoid (not eligible for meters) | 1MPa (g) | 1MPa (g) | Digital: RS485 Analog: 0-5VDC/4-20ma (Voluntary Switching) | Digital: RS485 Analog: 0-5VDC/4-20mA (voluntary switching) | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 2-100 % F.S (Not Eligible for Meters) | 2-100 % F.S (not eligible for meters) | VARIOUS GASES (PLEASE CONTACT us for color) | Various gases (please contact us for corrosion gas) | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10SLM | ± 1 % F.S (Accuracy Guarantee Range 15-35 ° C) | Body Display: 7 Sement LED Digital: RS485 Analog: 0-5VDC/4-20ma (Voluntary Switching) | - | Body Display Setting Device/Event Input/Output Switching Digital: RS485 Analog: 0.1 to 5VDC/4.3 To 20ma (Voluntary Switching) | - | 10SLM | ± 1 % F.S (accuracy guarantee range 15-35 ° C) | Body Display: 7 Sement LED Digital: RS485 Analog: 0-5VDC/4-20mA (voluntary switching) | - | Body display setting device/event input/output switching digital: RS485 analog: 0.1 to 5VDC/4.3 to 20mA (voluntary switching) | - | - | - | SUS316, PTFE, Fluorine Rubber | SUS316, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 100-300kpa | 100-300kpa | #ERROR! | - | #ERROR! | - | ± 0.2 % F.S | ± 0.2 % F.S | ≦ 2sec | ≦ 2sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | NC: Normal Close (Not Eligible for Meters) | NC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
C1005 |
Available upon quote | - | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | VARIOUS GASES (PLEASE CONTACT us for color) | Various gases (please contact us for corrosion gas) | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 2 % F.S [ * ± 1 % F.S Compatible] | 0-5VDC | - | 0.25-5VDC (Not Eligible for Meters) | - | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) * Please contact us for details. | 0-5VDC | - | 0.25-5VDC (not eligible for meters) | - | - | - | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 50-300kpa | 50-300kpa | #ERROR! | - | #ERROR! | - | ± 0.2 % F.S | ± 0.2 % F.S | ≦ 6sec | ≦ 6sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open Newnc: Normal Close (Not Eligible for Meters) | NO: Normal Open NEWNC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
C1020 |
Available upon quote | - | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | VARIOUS GASES (PLEASE CONTACT us for color) | Various gases (please contact us for corrosion gas) | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10,20slm | ± 2 % F.S [ * ± 1 % F.S Compatible] | 0-5VDC | - | 0.25-5VDC (Not Eligible for Meters) | - | 10,20slm | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) * Please contact us for details. | 0-5VDC | - | 0.25-5VDC (not eligible for meters) | - | - | - | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 50-300kpa | 50-300kpa | 15VDC: 60ma, -15VDC: 150ma | - | 15VDC: 60mA, -15VDC: 150ma | - | ± 0.2 % F.S | ± 0.2 % F.S | ≦ 6sec | ≦ 6sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open Newnc: Normal Close (Not Eligible for Meters) | NO: Normal Open NEWNC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
C1030 / C1050 |
Available upon quote | - | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | Air, N2, AR, H2, Co2, O2, He | Air, N2, AR, H2, CO2, O2, HE | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 30,50SLM | ± 2 % F.S [ * ± 1 % F.S Compatible] | 0-5VDC | - | 0.25-5VDC (Not Eligible for Meters) | - | 30,50SLM | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) * Please contact us for details. | 0-5VDC | - | 0.25-5VDC (not eligible for meters) | - | - | - | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 200-300kpa | 200-300kpa | 15VDC: 60ma, -15VDC: 150ma | - | 15VDC: 60mA, -15VDC: 150ma | - | ± 0.2 % F.S | ± 0.2 % F.S | ≦ 10sec | ≦ 10sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open Newnc: Normal Close (Not Eligible for Meters) | NO: Normal Open NEWNC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
C1100 |
Available upon quote | - | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | Air / n2 | Air / N2 | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 100lm | ± 2 % F.S [ * ± 1 % F.S Compatible] | 0-5VDC | - | 0.25-5VDC (Not Eligible for Meters) | - | 100lm | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) * Please contact us for details. | 0-5VDC | - | 0.25-5VDC (not eligible for meters) | - | - | - | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | Not Specified (Free) | Not specified (free) | 200-300kpa | 200-300kpa | 15VDC: 60ma, -15VDC: 150ma | - | 15VDC: 60mA, -15VDC: 150ma | - | ± 0.5 % F.S | ± 0.5 % F.S | ≦ 15sec | ≦ 15sec | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open Newnc: Normal Close (Not Eligible for Meters) | NO: Normal Open NEWNC: Normal Close (not eligible for meters) | 5-50 ° C, 85 % RH or Less | 5-50 ° C, 85 % RH or less | - | Machine processing finish | |
CUBE MFC 1005 /1020 /1030 /1050 /1100 |
Available upon quote | AC Cable, Instructure Manual | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | - | - | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10SCCM ~ 100SLM (Equivalent to MFC/MFM Installed) | ± 2 % F.S [ * ± 1 % F.S Compatible] | - | Variable with 0.25-5VDC, 10 -Rotation Potential Meter (Not Eligible for Meters) | - | 0 to 5VDC/DP Display: Scaling Display (Setting/Output Display Switching in The Field, Back Setting/Output Monitor Terminal) | 10SCCM ~ 100SLM (equivalent to MFC/MFM installed) | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) Please contact us for details | - | Variable with 0.25-5VDC, 10 -rotation potential meter (not eligible for meters) | - | 0 to 5VDC/DP display: Scaling display (setting/output display switching in the field, back setting/output monitor terminal) | According to the MFC/MFM Installed | According to the MFC/MFM installed | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | - | - | According to the mfc Installed | According to the MFC installed | - | AC100-240V: 500ma | - | AC100-240V: 500ma | ± 0.2 % F.S | ± 0.2 % F.S | According to the mfc Installed | According to the MFC installed | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open, NEWNC: Normal Close (Not Eligible for Meters) | NO: Normal Open, NEWNC: Normal Close (not eligible for meters) | 5-50 ° C (Accuracy Guarantee Range: 15-35 ° C), 85 % RH or Less (Without Condending) | 5-50 ° C (accuracy guarantee range: 15-35 ° C), 85 % RH or less (without condensation) | AC cable, instruction manual | Machine processing finish |
Click on the part number for more information about each product