High temperature mass flow controller
FCC
About This Product
It is a digital mass flow controller for high temperature at MAX80 ° C. It can be used in a wide range of fields such as semiconductors, solar panels, fuel cells, and general industries. Cover the flow control range (2 to 100 %) completely within 1sec. It is a product that supports ROHS regulations and is in consideration of the global environment.
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Product
High temperature mass flow controller
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Handling Company
FCC
3 Models of High temperature mass flow controller
Items marked with have different values depending on the model number.
Click on the part number for more information about each product
| Product Image | Part Number | Price (excluding tax) | Actuator method | Bearing pressure | Communication method | Connecting joint | Control flow rate range | Digital communication | External leak | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate setting signal | Flowing output signal | Interviewed gas part material | Maximum operating pressure | Mounting posture | Necessary differential pressure | Power supply voltage, current consumption | Reproducibility | Response time | Sticker material | Used guarantor temperature range | Valve operation | surface treatment |
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FCST1005MF-HT / FCST1005MFD-HT |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | 1 x 10-11PA/M3/SECHE | 10,20,30,50,100,200,300,500scm1,2,3,5slm | ± 1 % F.S (accuracy guarantee range: 50-80 ° C) | 0.1-5VDC | 0-5VDC | SUS316, magnetic stainless steel, PTFE | 400kpa (g) | Not specified (free) | 50-300kpa | #ERROR! | ± 0.2 % F.S | ≦ 1sec | SUS316L | 50-80 ° C | NC: Normal Close NO: Normal Open | EP processing option |
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FCST1030MF-HT / FCST1030MFD-HT |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | 1 x 10-11PA/M3/SECHE | 10,20,30slm | ± 1 % F.S (accuracy guarantee range: 50-80 ° C) | 0.1-5VDC | 0-5VDC | SUS316, magnetic stainless steel, PTFE | 400kpa (g) | Not specified (free) | NO50-300kpa (6-10SLM) 100-300kpa (11-20slm) 150-300kpa (21-30SLM) NC50 ~ 300kpa (6-10SLM) 100-300kpa (11-30SLM) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | SUS316L | 50-80 ° C | NC: Normal Close NO: Normal Open | EP processing option |
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FCST1050MF-HT / FCST1050MFD-HT |
Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | 1 x 10-11PA/M3/SECHE | 40,50SLM | ± 1 % F.S (accuracy guarantee range: 50-80 ° C) | 0.1-5VDC | 0-5VDC | SUS316, magnetic stainless steel, PTFE | 400kpa (g) | Not specified (free) | 200-300kpa | #ERROR! | ± 0.2 % F.S | ≦ 1sec | SUS316L | 50-80 ° C | NC: Normal Close NO: Normal Open | EP processing option |
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