FCST1030MF-HT / FCST1030MFD-HT | High temperature mass flow controller
FCC
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Actuator method
Bearing pressure
Communication method
Connecting joint
Control flow rate range
Digital communication
External leak
Flow rate (N2 conversion flow rate)
Flow rate accuracy
Flow rate setting signal
Flowing output signal
Interviewed gas part material
Maximum operating pressure
Mounting posture
Necessary differential pressure
Power supply voltage, current consumption
Reproducibility
Response time
Sticker material
Used guarantor temperature range
Valve operation
surface treatment
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Part Number
FCST1030MF-HT / FCST1030MFD-HT
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Handling Company
FCC
High temperature mass flow controller FCST1030MF-HT / FCST1030MFD-HT's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Actuator method | Bearing pressure | Communication method | Connecting joint | Control flow rate range | Digital communication | External leak | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate setting signal | Flowing output signal | Interviewed gas part material | Maximum operating pressure | Mounting posture | Necessary differential pressure | Power supply voltage, current consumption | Reproducibility | Response time | Sticker material | Used guarantor temperature range | Valve operation | surface treatment |
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Available upon quote | Solenoid actuator | 1MPa (g) | Analog: 0-5VDC/Digital: RS485 (Fujikin Protocol), DeviceNet | 1/4 inch UJR, 1/4 inch F900, 1.5W-SEAL, 1.125W-SEAL, 1.125C-SEAL | 2-100 % F.S | RS485, standard communication speed 38400bps, maximum connection number 127 units | 1 x 10-11PA/M3/SECHE | 10,20,30slm | ± 1 % F.S (accuracy guarantee range: 50-80 ° C) | 0.1-5VDC | 0-5VDC | SUS316, magnetic stainless steel, PTFE | 400kpa (g) | Not specified (free) | NO50-300kpa (6-10SLM) 100-300kpa (11-20slm) 150-300kpa (21-30SLM) NC50 ~ 300kpa (6-10SLM) 100-300kpa (11-30SLM) | #ERROR! | ± 0.2 % F.S | ≦ 1sec | SUS316L | 50-80 ° C | NC: Normal Close NO: Normal Open | EP processing option |
There are 3 models for this product.
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