CUBE MFC 1005 /1020 /1030 /1050 /1100 | Mass flow controller
FCC
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ActuAtor Method
Actuator method
Bearing pressure
Bearing presure
Communication Method
Communication method
Connecting Joint
Connecting joint
Control Flow Rate Range
Control flow rate range
CorResponging Gas Species
Corresponding gas species
EXTERNAL LEAK
External leak
Flow Rate (N2 Conversion Flow Rate)
Flow Rate Accuracy
Flow Rate Output
Flow Setting (Not Eligible for Meters)
Flow rate (N2 conversion flow rate)
Flow rate accuracy
Flow rate output
Flow setting (not eligible for meters)
Interviewed Gas Part Material
Interviewed gas part material
Mounting Posture
Mounting posture
Necessary Differential Pressure
Necessary differential pressure
Power Supply Voltage, Current Consonations
Power supply voltage, current consumption
Reproducibility
Reproduction
Response Time
Response time
Sticker Material
Sticker material
Surface Treatment
Valve Type
Valve type
Warranty Temperature
Warranty temperature
surface treatment
Accessories
Flow Rate Setting
Flow Setting/Output Signal/Display
Flow rate setting
Flow setting/output signal/display
Gas Species
Gas species
Power Supply, Current ConsonSamption
Power supply, current consumption
accessories
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Part Number
CUBE MFC 1005 /1020 /1030 /1050 /1100
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Product
Mass flow controller
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Handling Company
FCC
Mass flow controller CUBE MFC 1005 /1020 /1030 /1050 /1100's performance table
Items marked with have different values depending on the model number.
| Product Image | Price (excluding tax) | Accessories | ActuAtor Method | Actuator method | Bearing pressure | Bearing presure | Communication Method | Communication method | Connecting Joint | Connecting joint | Control Flow Rate Range | Control flow rate range | EXTERNAL LEAK | External leak | Flow Rate (N2 Conversion Flow Rate) | Flow Rate Accuracy | Flow Rate Setting | Flow Setting/Output Signal/Display | Flow rate (N2 conversion flow rate) | Flow rate accuracy | Flow rate setting | Flow setting/output signal/display | Gas Species | Gas species | Interviewed Gas Part Material | Interviewed gas part material | Necessary Differential Pressure | Necessary differential pressure | Power Supply, Current ConsonSamption | Power supply, current consumption | Reproducibility | Reproduction | Response Time | Response time | Sticker Material | Sticker material | Surface Treatment | Valve Type | Valve type | Warranty Temperature | Warranty temperature | accessories | surface treatment |
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Available upon quote | AC Cable, Instructure Manual | Thermal (Not Eligible for Meters) | Thermal (not eligible for meters) | 1MPa (g) | 1MPa (g) | Analog: 0-5VDC | Analog: 0-5VDC | PLEASE CONTACT US for 1/4in.swl (Equivalent), ONE -Touch Switch, and Other Joint Shapes. | Please contact us for 1/4in.SWL (equivalent), one -touch switch, and other joint shapes. | 5-100 % F.S (Not Eligible for Meters) | 5-100 % F.S (not eligible for meters) | 1 x 10-7Pa/M3/SECHE | 1 x 10-7PA/M3/SECHE | 10SCCM ~ 100SLM (Equivalent to MFC/MFM Installed) | ± 2 % F.S [ * ± 1 % F.S Compatible] | Variable with 0.25-5VDC, 10 -Rotation Potential Meter (Not Eligible for Meters) | 0 to 5VDC/DP Display: Scaling Display (Setting/Output Display Switching in The Field, Back Setting/Output Monitor Terminal) | 10SCCM ~ 100SLM (equivalent to MFC/MFM installed) | ± 2 % F.S [ * ± 1 % F.S compatible] (accuracy guarantee range 15-35 ° C) Please contact us for details | Variable with 0.25-5VDC, 10 -rotation potential meter (not eligible for meters) | 0 to 5VDC/DP display: Scaling display (setting/output display switching in the field, back setting/output monitor terminal) | According to the MFC/MFM Installed | According to the MFC/MFM installed | SUS316L, PTFE, Fluorine Rubber | SUS316L, PTFE, fluorine rubber | According to the mfc Installed | According to the MFC installed | AC100-240V: 500ma | AC100-240V: 500ma | ± 0.2 % F.S | ± 0.2 % F.S | According to the mfc Installed | According to the MFC installed | Fluorine Rubber | Fluorine rubber | Machine Processing Finish | No: Normal Open, NEWNC: Normal Close (Not Eligible for Meters) | NO: Normal Open, NEWNC: Normal Close (not eligible for meters) | 5-50 ° C (Accuracy Guarantee Range: 15-35 ° C), 85 % RH or Less (Without Condending) | 5-50 ° C (accuracy guarantee range: 15-35 ° C), 85 % RH or less (without condensation) | AC cable, instruction manual | Machine processing finish |
There are 8 models for this product.
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