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  4. Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers (Bruker Corporation)
Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers-Sirius RF
Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers-Bruker Corporation

Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers
Bruker Corporation

About This Product

■High-speed XRP&XRF measurement for metal film thickness and composition evaluation of patterned wafers

The Bruker Sirius RF-T is the successor to the JVX 7300RF-T, which is already used in many fabs around the world, and is a multi-channel measurement platform that combines micro-spot XRF and patented high-speed, micro-XRR. By combining pattern recognition, it is possible to measure on minute pads and scribe lines. XRF can measure film thickness using a calibration curve and perform composition analysis using a calibration curve, making it possible to measure a wide range of film thicknesses from very thin films to films as thick as 1 μm. XRR can perform absolute film thickness measurements, and with its unique optical system, measurements can be completed in a few seconds per point. The advanced automatic stabilization mechanism is designed to minimize the burden on the user such as redrawing the calibration curve.

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    Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers

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1 Models of Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers

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Sirius RF-T, high-speed XRR & XRF measurement device for evaluating metal film thickness and composition of patterned wafers-Part Number-Sirius RF

Sirius RF

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Bruker Corporation

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Bruker, founded in 1960 and based in Billerica, Massachusetts, is a manufacturer and distributor of scientific...

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X-Ray Fluorescence (XRF) Analyzers
X-Ray Fluorescence (XRF) Analyzers　Bruker Corporation
Bruker Corporation

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