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FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-FHC30S-G0ctg-D40-1MAA-1N
FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-OVAL Corporation

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof
OVAL Corporation

OVAL Corporation's Response Status

Response Rate

100.0%

Response Time

23.1hours

Relatively Fast Response


About This Product

It is a hydrogen -proof structure model of the FHA series for general -purpose gas flow rate. Similarly, the FHD series is a hydrogen explosion -proof structure of the control valve of the General -Lass Mass Flow Controller FHB series. By combining these, you can configure an explosion -proof gas mass flow controller. Ideal for various gas supply systems, gasmixing processes, pilot plants, semiconductor manufacturing processes, and gas flow measurement and control in dangerous places such as research institutes.

■ Main features

・ It is a JIS explosion -proof structure “D3AG4” type that can be applied to hydrogen gas. ・ Cover the wide flow range from 5Nccm (ml/min [normal]) to 500nlm (L/min [normal)). (Up to 100nlm as a controller) ・ The optimal full scale adjustment is possible by the Reminar flow element. ・ It supports a wide range of pressure from vacuum to up to 39.2MPa. ・ It can be applied to most gas bodies other than high -corrosive caries. ・ Excellent responsiveness. -The control valve is an electromagnetic type of the Normal Close type, so it has a good response and can be used safely. ・ You can handle a variety of applications by combining with the lead out unit. * There are other model numbers.

  • Product

    FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof

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10 Models of FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof

Click on the part number for more information about each product

Image Part Number Price (excluding tax) connection Turndown Operating temperature limit accuracy Model Maximum use pressure Full scale flow rate Body structure fluid temperature Body material Process connection (body) Explosion -proof structure Temperature grade/ignition degree Laws and regulations Converter structure power supply Input / output signal version Sticker material Special specifications
FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-1N

FHC30S-G0ctg-D40-1MAA-1N

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Fluorine rubber/FKM

None (standard)

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-1Z

FHC30S-G0ctg-D40-1MAA-1Z

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Fluorine rubber/FKM

Special

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-2N

FHC30S-G0ctg-D40-1MAA-2N

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Chloroprene rubber/CR

None (standard)

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-2Z

FHC30S-G0ctg-D40-1MAA-2Z

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Chloroprene rubber/CR

Special

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-3N

FHC30S-G0ctg-D40-1MAA-3N

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Palpul Oloerastomer/FFKM

None (standard)

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-3Z

FHC30S-G0ctg-D40-1MAA-3Z

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Palpul Oloerastomer/FFKM

Special

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-4N

FHC30S-G0ctg-D40-1MAA-4N

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Multiple combinations

None (standard)

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-4Z

FHC30S-G0ctg-D40-1MAA-4Z

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Multiple combinations

Special

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-5N

FHC30S-G0ctg-D40-1MAA-5N

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Special

None (standard)

FHA series hydrogen-proof structure model thermal mass flow meter / controller MASFLO-OVALⅡ Explosion-proof-Part Number-FHC30S-G0ctg-D40-1MAA-5Z

FHC30S-G0ctg-D40-1MAA-5Z

Available upon quote

Kuikuinjin, metal gasket surface sticker, etc.

1:50

-10 ~ + 50 ℃

Full -scale ± 1 % (in real gas calibration)

Massflow meter (explosion -proof)

39.2MPa

7.5 ml/min (normal) at air

The standard joint welding is "special"

gas

standard

SUS316

Passion parallel screw (standard)

TIIS Explosion (D3AG4)

G4 (TIIS)

standard

Integrated form

± 15VDC power supply

Analog signal FHC

Version A

Special

Special

Click on the part number for more information about each product

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About Company Handling This Product

Response Rate

100.0%


Response Time

23.1hrs

Company Overview

OVAL Corporation, founded in Tokyo, Japan, in 1949 is a manufacturer of metrological control equipment and rel...

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  • Japan

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