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  4. Fluorescent X-ray analyzer Wafer surface analyzer K-TRX (Ryokosha Co., Ltd.)
Fluorescent X-ray analyzer Wafer surface analyzer K-TRX-K-TRX
Fluorescent X-ray analyzer Wafer surface analyzer K-TRX-Ryokosha Co., Ltd.

Fluorescent X-ray analyzer Wafer surface analyzer K-TRX
Ryokosha Co., Ltd.

About This Product

■Summary

Total internal reflection fluorescent X-ray equipment compatible with wafers up to 300mm. This is a device that evaluates metal contamination on semiconductor wafers, etc.

■Features

Equipped with mapping function and edge measurement function for measuring elements Na to U. A newly developed angle adjustment mechanism achieves high throughput.

■Application

Confirmation of semiconductor wafer metal contamination before and after processing. Confirmation of particle-based metal contamination on glass substrates, etc.

■Main specifications

・Simultaneous measurement of multiple elements Elements from Na to U can be measured simultaneously. ・Non-destructive analysis Non-destructive measurement using X-rays ・Easy measurement Automatically possible from measurement to report creation ・Mapping function: Measurement of in-plane contamination distribution is possible. ・Edge measurement Supports edge measurement. ・High throughput Newly developed angle adjustment mechanism achieves high throughput ・Low running costs Combination of sealed X-ray tube and nitrogen-less X-ray detector ・Space-saving Size approx. 2.4m2/ ~12 inch wafer compatible

  • Product

    Fluorescent X-ray analyzer Wafer surface analyzer K-TRX

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1 Models of Fluorescent X-ray analyzer Wafer surface analyzer K-TRX

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Fluorescent X-ray analyzer Wafer surface analyzer K-TRX-Part Number-K-TRX

K-TRX

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Ryokosha Co., Ltd.

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