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High -precision measurement achievement of spectroscopy erypsometer large base support-Mass-103ST
High -precision measurement achievement of spectroscopy erypsometer large base support-Fiblab Co., Ltd.

High -precision measurement achievement of spectroscopy erypsometer large base support
Fiblab Co., Ltd.


About This Product

■ type

Multiple incidence, short wavelength, long wavelength

■ High precision measurement II

The rotating phase phase method is adopted in the measurement method, and high -precision measurement is realized in any area, regardless of the value of the measured value δ (phase difference).

■ High precision measurement Ⅱ

The phase plate uses a dedicated phase plate.

■ Wavelength resolution ability

The monochrome meter uses a multi -channel compatible with a 2D CCD of 1,024 divisions, so you can perform a high -wave resolution of 0.75 nm in a short time.

■ Analysis power

Our analysis software was developed with emphasis on usability to smoothly analyze complicated lighting erypo. However, the high -analysis power such as EMA analysis and EMF analysis is maintained as it is. In addition, it is equipped with a spectral analysis software "Scout" that covers our analysis software, such as the introduction of a unique wavelength distributed type and analysis of anisotropy.

■ Reproduction

High re -measurement is achieved by combining the optical encoder and the hall motor.

■ Reliability

At the time of calibration, in addition to SIO2/SI samples of several types of SIO2/SI of NIST standards, two types of glass substrates are measured to increase the reliability of data.

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    High -precision measurement achievement of spectroscopy erypsometer large base support

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9 Models of High -precision measurement achievement of spectroscopy erypsometer large base support

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103ST

Mass-103ST

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103SH

Mass-103SH

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103SM

Mass-103SM

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103ft

Mass-103ft

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103FH

Mass-103FH

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103FM

Mass-103FM

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103MT

Mass-103MT

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103MH

Mass-103MH

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High -precision measurement achievement of spectroscopy erypsometer large base support-Part Number-Mass-103mm

Mass-103mm

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