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History
Response Rate
100.0%
Response Time
1.7hours
Very Fast Response
Product
Small sputtering equipment SS-DC RF301Handling Company
Arios Co., Ltd.Categories
| Image | Part Number | Price (excluding tax) | Weight | Vacuum gauge | Utility power | Utilities Nitrogen gas (for purge) | Utility Process gas | Main body stand | Exhaust system | Substrate heating temperature | Board up/down mechanism | Board stage | Ultimate pressure | Leak amount | Size | Gas supply system | Cathode power supply | Cathode cooling method | Cathode target material | Cathode target size | Cathode |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
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SS-DC RF301 |
Available upon quote |
Approximately 100kg |
Full range vacuum gauge (cold cathode + Pirani gauge) |
AC200V single phase 20A) |
0.05~0.1 MPa (1/4 SwagelokTM or 1/4 VCRTM) |
Ar (1/4 SwagelokTM or 1/4 VCRTM) |
With caster adjuster |
TMP + diaphragm pump |
MAX 500℃ (MAX 800℃ available as an option) |
Stroke 100mm Manual operation O-ring shaft seal |
2 inch compatible stage |
3×10^-4 Pa or less |
1×10^-8 Pa・m^3/sec or less (excluding O-ring transmission) |
W540×D600 H1280 (excluding connector parts, etc.) |
MFC1 system (Ar) 1/4 SwagelokTM or VCRTM connection |
DC output 500W or RF output 300W |
Water-cooled (equipped with chiller) |
Various mechanical chuck methods or bonding methods |
2 inches |
Magnetron cathode |
Reviews shown here are reviews of companies.
Reviews shown here are reviews of companies.
Response Rate
100.0%
Response Time
1.7hrs
