RF plasma experimental equipment RFPC-550-RFPC-550

RF plasma experimental equipment RFPC-550
Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

Response Rate

100.0%

Response Time

1.7hours

Very Fast Response

About This Product

■SummaryThis equipment is an experimental RF plasma equipment that consists of an RF plasma source, substrate heating mechanism, gas supply system, and load lock chamber, and is capable of converting various raw material gases into plasma and processing substrates. By changing conditions such as gas type and gas pressure, a wide range of plasma processing experiments are possible. Flexible design is only possible because we design our plasma sources in-house. We design and manufacture according to the customer's required specifications.

■Features- Easy operation with automatic matching.
- Compact chamber + simple configuration allows for easy maintenance.
-Equipped with an interlock to prevent high voltage electric shock from RF (RF can only be applied when in vacuum).
-Equipped with high frequency leakage measures and a mechanism to safely stop in the event of a power outage.
・Load lock mechanism can be added as an option. Introducing the board can be done extremely easily and in a short time without exposing it to the atmosphere.

■Options・Substrate heating mechanism: Maximum heating temperature 900℃, substrate position variable up and down, power supply DC power supply + temperature controller
・Load lock room: TMP+RP
・Processing room: RP + foreline trap (oil mist trap)

Model
There is 1 model available for this product.

Product
RF plasma experimental equipment RFPC-550

Handling Company
Arios Co., Ltd.

Categories

Machining / Machine Tools

Plasma Cleaning Systems

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1 Models of RF plasma experimental equipment RFPC-550

Image	Part Number	Price (excluding tax)	Power supply section	Vacuum gauge	Vacuum exhaust system	Utility	Main body stand	Counter electrode	Board holder	Processing room	Load lock chamber	Plasma source	Gas supply system	RF output power
	RFPC-550	Available upon quote	Breaker box 1 set, RP switch panel 1 set, vacuum gauge controller 1 set, RF power supply	Thermocouple vacuum gauge (or diaphragm gauge)	Main pump RP + oil mist trap	AC200V 3-phase 20A (maximum) Process gas: Inert gas SwagelokTM 1/4 or VCRTM 1/4 2 lines	With casters and adjusters (including power supply), weight approximately 300kg	Material: Aluminum, 240mm x 300mm (MAX), vertical drive O-ring type manual	Material: Aluminum, 240mm x 300mm (MAX), RF application electrode	Made of SUS 304	SUS 304 hatch port + O-ring type transfer rod	RF: 0~500W variable + automatic matching box (manual tuning possible) (Inductive coupling or capacitive coupling, reaction tube: φ40×36 quartz tube)	2 needle valves (or mass flow controller)	0~550W (13.56MHz±1kHz)

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About Company Handling This Product

Arios Co., Ltd.

Response Rate

100.0%

Response Time

1.7hrs

Japan

RF plasma experimental equipment RFPC-550 Arios Co., Ltd.

Arios Co., Ltd.'s Response Status

About This Product

■Summary

■Features

■Options

1 Models of RF plasma experimental equipment RFPC-550

RFPC-550

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About Company Handling This Product

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RF plasma experimental equipment RFPC-550
Arios Co., Ltd.